Fabrication and testing of Micro Electro Mechanical Systems (MEMS) flow sensors
This report illustrates the design, fabrication and experimental results of a liquid crystal polymer (LCP) membrane pressure sensor for air flow and air direction applications. The LCP proves to be a material which is more sensitive and reliable when used in MEMS. Due to its physical and chemical pr...
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| Format: | Final Year Project (FYP) |
| Language: | English |
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2013
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| Online Access: | http://hdl.handle.net/10356/53975 |