Optical monitoring of time-dependent topographies in microfabrication
The main aim of this project was to develop methodology using existing patented CDH system to monitor time-dependent topographies in microfabrication, particularly in wet chemical etching. To achieve this aim, an actual etch rate was predetermined through experiments and will be used as a reference...
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| Format: | Final Year Project (FYP) |
| Language: | English |
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2013
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| Online Access: | http://hdl.handle.net/10356/54149 |