Preparation of shape-memory-alloy thin film for actuator
NiTiCu thin films have been successfully prepared through NiTi alloy target and pure copper target. Film composition, microstructure, crystallization, phase transformation behavior, residual stress and lattice parameter of the TiNiCu films were investigated.
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| Formato: | Tese |
| Publicado em: |
2008
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| Acesso em linha: | http://hdl.handle.net/10356/5513 |
| _version_ | 1826120147528581120 |
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| author | Zhang, Cengling |
| author2 | Du, Hejun |
| author_facet | Du, Hejun Zhang, Cengling |
| author_sort | Zhang, Cengling |
| collection | NTU |
| description | NiTiCu thin films have been successfully prepared through NiTi alloy target and pure copper target. Film composition, microstructure, crystallization, phase transformation behavior, residual stress and lattice parameter of the TiNiCu films were investigated. |
| first_indexed | 2024-10-01T05:11:27Z |
| format | Thesis |
| id | ntu-10356/5513 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T05:11:27Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/55132023-03-11T16:58:11Z Preparation of shape-memory-alloy thin film for actuator Zhang, Cengling Du, Hejun School of Mechanical and Production Engineering DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films NiTiCu thin films have been successfully prepared through NiTi alloy target and pure copper target. Film composition, microstructure, crystallization, phase transformation behavior, residual stress and lattice parameter of the TiNiCu films were investigated. Master of Science (Precision Engineering) 2008-09-17T10:52:25Z 2008-09-17T10:52:25Z 2001 2001 Thesis http://hdl.handle.net/10356/5513 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films Zhang, Cengling Preparation of shape-memory-alloy thin film for actuator |
| title | Preparation of shape-memory-alloy thin film for actuator |
| title_full | Preparation of shape-memory-alloy thin film for actuator |
| title_fullStr | Preparation of shape-memory-alloy thin film for actuator |
| title_full_unstemmed | Preparation of shape-memory-alloy thin film for actuator |
| title_short | Preparation of shape-memory-alloy thin film for actuator |
| title_sort | preparation of shape memory alloy thin film for actuator |
| topic | DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films |
| url | http://hdl.handle.net/10356/5513 |
| work_keys_str_mv | AT zhangcengling preparationofshapememoryalloythinfilmforactuator |