Design and development of capacitive ultrasonic transducer using silicon micromachining techniques
Ultrasound has many applications such as ranging, nondestructive evaluation, gas flow measurement, and acoustic microscopy. Conventional piezoelectric transducers perform poorly for these applications due to the lack of proper matching layer materials between the transducer and air. Capacitive ultra...
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| Format: | Thesis |
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2008
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| Online Access: | http://hdl.handle.net/10356/5533 |
| _version_ | 1826114891822399488 |
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| author | Chen, Zhong Yi. |
| author2 | Lin, Rongming |
| author_facet | Lin, Rongming Chen, Zhong Yi. |
| author_sort | Chen, Zhong Yi. |
| collection | NTU |
| description | Ultrasound has many applications such as ranging, nondestructive evaluation, gas flow measurement, and acoustic microscopy. Conventional piezoelectric transducers perform poorly for these applications due to the lack of proper matching layer materials between the transducer and air. Capacitive ultrasonic transducers promise higher efficiency and broader bandwidth performance for these applications. The capacitive ultrasonic transducer developed in this project is based on standard silicon micromachining technology. It consists of a metalized membrane (top electrode) suspended above a heavily doped silicon backplate (bottom electrode). |
| first_indexed | 2024-10-01T03:46:37Z |
| format | Thesis |
| id | ntu-10356/5533 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T03:46:37Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/55332023-03-11T17:46:10Z Design and development of capacitive ultrasonic transducer using silicon micromachining techniques Chen, Zhong Yi. Lin, Rongming School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing Ultrasound has many applications such as ranging, nondestructive evaluation, gas flow measurement, and acoustic microscopy. Conventional piezoelectric transducers perform poorly for these applications due to the lack of proper matching layer materials between the transducer and air. Capacitive ultrasonic transducers promise higher efficiency and broader bandwidth performance for these applications. The capacitive ultrasonic transducer developed in this project is based on standard silicon micromachining technology. It consists of a metalized membrane (top electrode) suspended above a heavily doped silicon backplate (bottom electrode). Master of Science 2008-09-17T10:52:51Z 2008-09-17T10:52:51Z 1999 1999 Thesis http://hdl.handle.net/10356/5533 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Manufacturing Chen, Zhong Yi. Design and development of capacitive ultrasonic transducer using silicon micromachining techniques |
| title | Design and development of capacitive ultrasonic transducer using silicon micromachining techniques |
| title_full | Design and development of capacitive ultrasonic transducer using silicon micromachining techniques |
| title_fullStr | Design and development of capacitive ultrasonic transducer using silicon micromachining techniques |
| title_full_unstemmed | Design and development of capacitive ultrasonic transducer using silicon micromachining techniques |
| title_short | Design and development of capacitive ultrasonic transducer using silicon micromachining techniques |
| title_sort | design and development of capacitive ultrasonic transducer using silicon micromachining techniques |
| topic | DRNTU::Engineering::Manufacturing |
| url | http://hdl.handle.net/10356/5533 |
| work_keys_str_mv | AT chenzhongyi designanddevelopmentofcapacitiveultrasonictransducerusingsiliconmicromachiningtechniques |