Intelligent hybrid simulation modelling environment for cycle time management of semiconductor wafer fabrication
Semiconductor wafer fabrication is characterised by capital intensive, multi-stage process, compound of different types of workstations, and re-entrant material flows. Within most wafer fabrication facilities, the cycle time of a wafer is much greater than the processing time. It is desirable to kee...
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| Other Authors: | |
| Format: | Thesis |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/6045 |
| _version_ | 1826109626444152832 |
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| author | Lim, Wei Dong. |
| author2 | De Souza, Robert |
| author_facet | De Souza, Robert Lim, Wei Dong. |
| author_sort | Lim, Wei Dong. |
| collection | NTU |
| description | Semiconductor wafer fabrication is characterised by capital intensive, multi-stage process, compound of different types of workstations, and re-entrant material flows. Within most wafer fabrication facilities, the cycle time of a wafer is much greater than the processing time. It is desirable to keep the cycle times manageable in the complex wafer fabrication systems. |
| first_indexed | 2024-10-01T02:21:20Z |
| format | Thesis |
| id | ntu-10356/6045 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T02:21:20Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/60452023-03-11T17:08:22Z Intelligent hybrid simulation modelling environment for cycle time management of semiconductor wafer fabrication Lim, Wei Dong. De Souza, Robert School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing::Production management Semiconductor wafer fabrication is characterised by capital intensive, multi-stage process, compound of different types of workstations, and re-entrant material flows. Within most wafer fabrication facilities, the cycle time of a wafer is much greater than the processing time. It is desirable to keep the cycle times manageable in the complex wafer fabrication systems. Doctor of Philosophy (MPE) 2008-09-17T11:05:31Z 2008-09-17T11:05:31Z 2000 2000 Thesis http://hdl.handle.net/10356/6045 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Manufacturing::Production management Lim, Wei Dong. Intelligent hybrid simulation modelling environment for cycle time management of semiconductor wafer fabrication |
| title | Intelligent hybrid simulation modelling environment for cycle time management of semiconductor wafer fabrication |
| title_full | Intelligent hybrid simulation modelling environment for cycle time management of semiconductor wafer fabrication |
| title_fullStr | Intelligent hybrid simulation modelling environment for cycle time management of semiconductor wafer fabrication |
| title_full_unstemmed | Intelligent hybrid simulation modelling environment for cycle time management of semiconductor wafer fabrication |
| title_short | Intelligent hybrid simulation modelling environment for cycle time management of semiconductor wafer fabrication |
| title_sort | intelligent hybrid simulation modelling environment for cycle time management of semiconductor wafer fabrication |
| topic | DRNTU::Engineering::Manufacturing::Production management |
| url | http://hdl.handle.net/10356/6045 |
| work_keys_str_mv | AT limweidong intelligenthybridsimulationmodellingenvironmentforcycletimemanagementofsemiconductorwaferfabrication |