Monolithic integration of GAAS-to-SI by direct wafer bonding

While Silicon remains the dominant material today in matured very-large-scale-integration technology, most of the III-V compound semiconductors are direct bandgap materials with high electron mobilities that are highly sought in advanced space, automobile, and telecommunication applications. Hence,...

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Bibliographic Details
Main Author: Yeo, Chiew Yong
Other Authors: Eugene A Fitzgerald
Format: Thesis
Language:English
Published: 2014
Subjects:
Online Access:https://hdl.handle.net/10356/61132
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author Yeo, Chiew Yong
author2 Eugene A Fitzgerald
author_facet Eugene A Fitzgerald
Yeo, Chiew Yong
author_sort Yeo, Chiew Yong
collection NTU
description While Silicon remains the dominant material today in matured very-large-scale-integration technology, most of the III-V compound semiconductors are direct bandgap materials with high electron mobilities that are highly sought in advanced space, automobile, and telecommunication applications. Hence, it would be ideal to integrate the best of Silicon and III-V compound semiconductors.
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spelling ntu-10356/611322020-11-12T08:39:11Z Monolithic integration of GAAS-to-SI by direct wafer bonding Yeo, Chiew Yong Eugene A Fitzgerald Yoon Soon Fatt School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering While Silicon remains the dominant material today in matured very-large-scale-integration technology, most of the III-V compound semiconductors are direct bandgap materials with high electron mobilities that are highly sought in advanced space, automobile, and telecommunication applications. Hence, it would be ideal to integrate the best of Silicon and III-V compound semiconductors. DOCTOR OF PHILOSOPHY (EEE) 2014-06-05T06:05:31Z 2014-06-05T06:05:31Z 2013 2013 Thesis Yeo, C .Y. (2013). Monolithic integration of GAAS-to-SI by direct wafer bonding. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/61132 10.32657/10356/61132 en 218 p. application/pdf
spellingShingle DRNTU::Engineering::Electrical and electronic engineering
Yeo, Chiew Yong
Monolithic integration of GAAS-to-SI by direct wafer bonding
title Monolithic integration of GAAS-to-SI by direct wafer bonding
title_full Monolithic integration of GAAS-to-SI by direct wafer bonding
title_fullStr Monolithic integration of GAAS-to-SI by direct wafer bonding
title_full_unstemmed Monolithic integration of GAAS-to-SI by direct wafer bonding
title_short Monolithic integration of GAAS-to-SI by direct wafer bonding
title_sort monolithic integration of gaas to si by direct wafer bonding
topic DRNTU::Engineering::Electrical and electronic engineering
url https://hdl.handle.net/10356/61132
work_keys_str_mv AT yeochiewyong monolithicintegrationofgaastosibydirectwaferbonding