Investigation of micro-EDM controllable factors on machined silicon surface quality

The present study examines the effect of interaction of micro-EDM controllable factors such as discharge-energy, traverse speed and feed rate on the surface integrity with p-type boron-doped silicon. The average surface roughness is quantitatively correlated to input discharge-energy. Further an emp...

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Bibliographic Details
Main Author: Nachiappan Ravi
Other Authors: Yeo, Swee Hock
Format: Thesis
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/6175
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author Nachiappan Ravi
author2 Yeo, Swee Hock
author_facet Yeo, Swee Hock
Nachiappan Ravi
author_sort Nachiappan Ravi
collection NTU
description The present study examines the effect of interaction of micro-EDM controllable factors such as discharge-energy, traverse speed and feed rate on the surface integrity with p-type boron-doped silicon. The average surface roughness is quantitatively correlated to input discharge-energy. Further an empirical relationship was computed between the average surface roughness and area fraction of voids. Next, a DOE (Design of Experiment) technique is adopted to describe specifically the interaction effect of the input controllable factors such as traverse speed and feed rate on the average surface roughness. Subsequently, a second order polynomial model that can adequately describe the relationship between the same is found.
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spelling ntu-10356/61752023-03-11T16:54:17Z Investigation of micro-EDM controllable factors on machined silicon surface quality Nachiappan Ravi Yeo, Swee Hock School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing::Product engineering The present study examines the effect of interaction of micro-EDM controllable factors such as discharge-energy, traverse speed and feed rate on the surface integrity with p-type boron-doped silicon. The average surface roughness is quantitatively correlated to input discharge-energy. Further an empirical relationship was computed between the average surface roughness and area fraction of voids. Next, a DOE (Design of Experiment) technique is adopted to describe specifically the interaction effect of the input controllable factors such as traverse speed and feed rate on the average surface roughness. Subsequently, a second order polynomial model that can adequately describe the relationship between the same is found. Master of Engineering (MPE) 2008-09-17T11:08:36Z 2008-09-17T11:08:36Z 2000 2000 Thesis http://hdl.handle.net/10356/6175 Nanyang Technological University application/pdf
spellingShingle DRNTU::Engineering::Manufacturing::Product engineering
Nachiappan Ravi
Investigation of micro-EDM controllable factors on machined silicon surface quality
title Investigation of micro-EDM controllable factors on machined silicon surface quality
title_full Investigation of micro-EDM controllable factors on machined silicon surface quality
title_fullStr Investigation of micro-EDM controllable factors on machined silicon surface quality
title_full_unstemmed Investigation of micro-EDM controllable factors on machined silicon surface quality
title_short Investigation of micro-EDM controllable factors on machined silicon surface quality
title_sort investigation of micro edm controllable factors on machined silicon surface quality
topic DRNTU::Engineering::Manufacturing::Product engineering
url http://hdl.handle.net/10356/6175
work_keys_str_mv AT nachiappanravi investigationofmicroedmcontrollablefactorsonmachinedsiliconsurfacequality