Optical nanoelecteromechanical systems (NEMS) devices and nano fabrication processes
This doctorate thesis focuses on the design, fabrication and testing of novel optical nanoelectromechanical systems (NEMS) devices. Specifically, a nano-actuator, a variable optical attenuator (VOA) and an optomechanical memory have been fabricated by nano-silicon-photonic fabrication processes. The...
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| Format: | Thesis |
| Language: | English |
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2015
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| Online Access: | https://hdl.handle.net/10356/62148 |
| _version_ | 1824454454031679488 |
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| author | Dong, Bin |
| author2 | Liu Aiqun |
| author_facet | Liu Aiqun Dong, Bin |
| author_sort | Dong, Bin |
| collection | NTU |
| description | This doctorate thesis focuses on the design, fabrication and testing of novel optical nanoelectromechanical systems (NEMS) devices. Specifically, a nano-actuator, a variable optical attenuator (VOA) and an optomechanical memory have been fabricated by nano-silicon-photonic fabrication processes. The first part of the thesis reports a NEMS actuator driven by optical gradient force. The optical force driven actuator realized by Q-factor modulation of the ring resonator can achieve an actuation range of 14 nm with a resolution of 0.18 nm. An optical displacement sensor is integrated to measure the actuation distance through optomechanical effects. The second part focuses on the development of a NEMS variable optical attenuator. In this design, optical attenuation is realized via a nano-waveguide-based optical directional coupler where the gap between waveguides is modulated by optical gradient force. Optical intensity can be attenuated to 10% of the original value with an actuation distance of at least 150 nm by tuning the wavelength of control light by 2 nm. The third part works on the optomechanical memory based on an optical force-induced bistability. A doubly-clamped silicon beam is actuated by the optical gradient force and bistability occurs as a result of nonlinearity of the optomechanical effects. The memory states can be switched by controlling the optical power from -10 dBm to -6 dBm. The switching speed is less than 150 ns. |
| first_indexed | 2025-02-19T03:22:34Z |
| format | Thesis |
| id | ntu-10356/62148 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2025-02-19T03:22:34Z |
| publishDate | 2015 |
| record_format | dspace |
| spelling | ntu-10356/621482023-07-04T16:30:40Z Optical nanoelecteromechanical systems (NEMS) devices and nano fabrication processes Dong, Bin Liu Aiqun School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems This doctorate thesis focuses on the design, fabrication and testing of novel optical nanoelectromechanical systems (NEMS) devices. Specifically, a nano-actuator, a variable optical attenuator (VOA) and an optomechanical memory have been fabricated by nano-silicon-photonic fabrication processes. The first part of the thesis reports a NEMS actuator driven by optical gradient force. The optical force driven actuator realized by Q-factor modulation of the ring resonator can achieve an actuation range of 14 nm with a resolution of 0.18 nm. An optical displacement sensor is integrated to measure the actuation distance through optomechanical effects. The second part focuses on the development of a NEMS variable optical attenuator. In this design, optical attenuation is realized via a nano-waveguide-based optical directional coupler where the gap between waveguides is modulated by optical gradient force. Optical intensity can be attenuated to 10% of the original value with an actuation distance of at least 150 nm by tuning the wavelength of control light by 2 nm. The third part works on the optomechanical memory based on an optical force-induced bistability. A doubly-clamped silicon beam is actuated by the optical gradient force and bistability occurs as a result of nonlinearity of the optomechanical effects. The memory states can be switched by controlling the optical power from -10 dBm to -6 dBm. The switching speed is less than 150 ns. DOCTOR OF PHILOSOPHY (EEE) 2015-02-10T07:30:50Z 2015-02-10T07:30:50Z 2015 2015 Thesis Dong, B. (2015). Optical nanoelecteromechanical systems (NEMS) devices and nano fabrication processes. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/62148 10.32657/10356/62148 en 192 p. application/pdf |
| spellingShingle | DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems Dong, Bin Optical nanoelecteromechanical systems (NEMS) devices and nano fabrication processes |
| title | Optical nanoelecteromechanical systems (NEMS) devices and nano fabrication processes |
| title_full | Optical nanoelecteromechanical systems (NEMS) devices and nano fabrication processes |
| title_fullStr | Optical nanoelecteromechanical systems (NEMS) devices and nano fabrication processes |
| title_full_unstemmed | Optical nanoelecteromechanical systems (NEMS) devices and nano fabrication processes |
| title_short | Optical nanoelecteromechanical systems (NEMS) devices and nano fabrication processes |
| title_sort | optical nanoelecteromechanical systems nems devices and nano fabrication processes |
| topic | DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems |
| url | https://hdl.handle.net/10356/62148 |
| work_keys_str_mv | AT dongbin opticalnanoelecteromechanicalsystemsnemsdevicesandnanofabricationprocesses |