Optical nanoelecteromechanical systems (NEMS) devices and nano fabrication processes
This doctorate thesis focuses on the design, fabrication and testing of novel optical nanoelectromechanical systems (NEMS) devices. Specifically, a nano-actuator, a variable optical attenuator (VOA) and an optomechanical memory have been fabricated by nano-silicon-photonic fabrication processes. The...
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| Format: | Thesis |
| Language: | English |
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2015
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| Online Access: | https://hdl.handle.net/10356/62148 |