A survey on miniature devices and their fabrication for medical applications
This dissertation gives a literature survey on different miniature devices for medical applications. Such miniature devices also known as microsystem technology devices consist of sensors, mechanical actuators, electronic parts, and processors in an integrated system. Currently available techniques...
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| Format: | Thesis |
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2008
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| Online Access: | http://hdl.handle.net/10356/6220 |
| _version_ | 1826126824881520640 |
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| author | Ng, Yin Mei. |
| author2 | Ng, Wan Sing |
| author_facet | Ng, Wan Sing Ng, Yin Mei. |
| author_sort | Ng, Yin Mei. |
| collection | NTU |
| description | This dissertation gives a literature survey on different miniature devices for medical applications. Such miniature devices also known as microsystem technology devices consist of sensors, mechanical actuators, electronic parts, and processors in an integrated system. Currently available techniques for forming these micromechanical devices are discussed. The two findamental techniques in microfabrication technology are namely silicon bulk and surface micromachining. Extension of the basic processes by using electro-precision machining, laser-assisted etching, photoforming, stereolithography and chemical/biological microparticles techniques, incorporating additional structural and sacrificial layers will provide even more flexibility in the design of micromechanical systems. With X-ray lithography, an electrode patterns linewidth of less than 20 nm can be achieved. |
| first_indexed | 2024-10-01T06:58:39Z |
| format | Thesis |
| id | ntu-10356/6220 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T06:58:39Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/62202023-03-11T17:05:37Z A survey on miniature devices and their fabrication for medical applications Ng, Yin Mei. Ng, Wan Sing School of Mechanical and Aerospace Engineering Gong, Feng DRNTU::Engineering::Mechanical engineering::Bio-mechatronics This dissertation gives a literature survey on different miniature devices for medical applications. Such miniature devices also known as microsystem technology devices consist of sensors, mechanical actuators, electronic parts, and processors in an integrated system. Currently available techniques for forming these micromechanical devices are discussed. The two findamental techniques in microfabrication technology are namely silicon bulk and surface micromachining. Extension of the basic processes by using electro-precision machining, laser-assisted etching, photoforming, stereolithography and chemical/biological microparticles techniques, incorporating additional structural and sacrificial layers will provide even more flexibility in the design of micromechanical systems. With X-ray lithography, an electrode patterns linewidth of less than 20 nm can be achieved. Master of Science (Biomedical Engineering) 2008-09-17T11:09:35Z 2008-09-17T11:09:35Z 2005 2005 Thesis http://hdl.handle.net/10356/6220 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Mechanical engineering::Bio-mechatronics Ng, Yin Mei. A survey on miniature devices and their fabrication for medical applications |
| title | A survey on miniature devices and their fabrication for medical applications |
| title_full | A survey on miniature devices and their fabrication for medical applications |
| title_fullStr | A survey on miniature devices and their fabrication for medical applications |
| title_full_unstemmed | A survey on miniature devices and their fabrication for medical applications |
| title_short | A survey on miniature devices and their fabrication for medical applications |
| title_sort | survey on miniature devices and their fabrication for medical applications |
| topic | DRNTU::Engineering::Mechanical engineering::Bio-mechatronics |
| url | http://hdl.handle.net/10356/6220 |
| work_keys_str_mv | AT ngyinmei asurveyonminiaturedevicesandtheirfabricationformedicalapplications AT ngyinmei surveyonminiaturedevicesandtheirfabricationformedicalapplications |