Job scheduling of batch furnace processing in semiconductor wafer fab using simulation approach
Semiconductor wafer fabrication is the most technologically complex and capital intensive phase in semiconductor manufacturing. In semiconductor wafer fab, furnaces are used for diffusion and deposition operations. A furnace is a batch-processing machine, which can simultaneously process a number of...
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| Format: | Thesis |
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2008
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| Online Access: | http://hdl.handle.net/10356/6404 |
| _version_ | 1824454205009559552 |
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| author | Subramanian Harhara Subramanian. |
| author2 | Sivakumar, Appa Iyer |
| author_facet | Sivakumar, Appa Iyer Subramanian Harhara Subramanian. |
| author_sort | Subramanian Harhara Subramanian. |
| collection | NTU |
| description | Semiconductor wafer fabrication is the most technologically complex and capital intensive phase in semiconductor manufacturing. In semiconductor wafer fab, furnaces are used for diffusion and deposition operations. A furnace is a batch-processing machine, which can simultaneously process a number of lots together as a batch. |
| first_indexed | 2025-02-19T03:18:36Z |
| format | Thesis |
| id | ntu-10356/6404 |
| institution | Nanyang Technological University |
| last_indexed | 2025-02-19T03:18:36Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/64042023-03-11T17:12:58Z Job scheduling of batch furnace processing in semiconductor wafer fab using simulation approach Subramanian Harhara Subramanian. Sivakumar, Appa Iyer School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing::Production management Semiconductor wafer fabrication is the most technologically complex and capital intensive phase in semiconductor manufacturing. In semiconductor wafer fab, furnaces are used for diffusion and deposition operations. A furnace is a batch-processing machine, which can simultaneously process a number of lots together as a batch. Master of Science (Computer Integrated Manufacturing) 2008-09-17T11:14:07Z 2008-09-17T11:14:07Z 2003 2003 Thesis http://hdl.handle.net/10356/6404 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Manufacturing::Production management Subramanian Harhara Subramanian. Job scheduling of batch furnace processing in semiconductor wafer fab using simulation approach |
| title | Job scheduling of batch furnace processing in semiconductor wafer fab using simulation approach |
| title_full | Job scheduling of batch furnace processing in semiconductor wafer fab using simulation approach |
| title_fullStr | Job scheduling of batch furnace processing in semiconductor wafer fab using simulation approach |
| title_full_unstemmed | Job scheduling of batch furnace processing in semiconductor wafer fab using simulation approach |
| title_short | Job scheduling of batch furnace processing in semiconductor wafer fab using simulation approach |
| title_sort | job scheduling of batch furnace processing in semiconductor wafer fab using simulation approach |
| topic | DRNTU::Engineering::Manufacturing::Production management |
| url | http://hdl.handle.net/10356/6404 |
| work_keys_str_mv | AT subramanianharharasubramanian jobschedulingofbatchfurnaceprocessinginsemiconductorwaferfabusingsimulationapproach |