Applications of gratings
Gratings are fundamental and important elements in optical metrology. Our particular interest involves two applications of gratings which are optical spectrometer and three-dimensional (3D) profilometer. An one-layer thin film thickness measurement system is established based on spectrometer, in...
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| Other Authors: | |
| Format: | Thesis |
| Language: | English |
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2016
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| Online Access: | http://hdl.handle.net/10356/68680 |
| _version_ | 1826113697383186432 |
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| author | Li, Xinyi |
| author2 | Asundi |
| author_facet | Asundi Li, Xinyi |
| author_sort | Li, Xinyi |
| collection | NTU |
| description | Gratings are fundamental and important elements in optical metrology. Our
particular interest involves two applications of gratings which are optical
spectrometer and three-dimensional (3D) profilometer. An one-layer thin film
thickness measurement system is established based on spectrometer, in which the
deflection is produced by diffraction in a diffraction grating. A calculation method
derived from thin film interference principle is applied to postprocessing. As the
second important application of grating, 3D profilometer combines the grating theory
with illumination technique, and is used for surface measurement. In other part of this
project, a 3D profilometer is designed using Digital Light Processing (DLP) fringe
projector and CCD camera. Moreover, a few attempts to measure the different types
of specimens have already been made with this 3D profilometer to identify what
effects would be induced by diffusive and shiny surface, dark and bright
environment, black and white color of objects, and polarizer. |
| first_indexed | 2024-10-01T03:27:28Z |
| format | Thesis |
| id | ntu-10356/68680 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T03:27:28Z |
| publishDate | 2016 |
| record_format | dspace |
| spelling | ntu-10356/686802023-03-11T16:53:18Z Applications of gratings Li, Xinyi Asundi School of Mechanical and Aerospace Engineering DRNTU::Engineering::Mechanical engineering Gratings are fundamental and important elements in optical metrology. Our particular interest involves two applications of gratings which are optical spectrometer and three-dimensional (3D) profilometer. An one-layer thin film thickness measurement system is established based on spectrometer, in which the deflection is produced by diffraction in a diffraction grating. A calculation method derived from thin film interference principle is applied to postprocessing. As the second important application of grating, 3D profilometer combines the grating theory with illumination technique, and is used for surface measurement. In other part of this project, a 3D profilometer is designed using Digital Light Processing (DLP) fringe projector and CCD camera. Moreover, a few attempts to measure the different types of specimens have already been made with this 3D profilometer to identify what effects would be induced by diffusive and shiny surface, dark and bright environment, black and white color of objects, and polarizer. Master of Science (Precision Engineering) 2016-05-30T08:46:51Z 2016-05-30T08:46:51Z 2016 Thesis http://hdl.handle.net/10356/68680 en 96 p. application/pdf |
| spellingShingle | DRNTU::Engineering::Mechanical engineering Li, Xinyi Applications of gratings |
| title | Applications of gratings |
| title_full | Applications of gratings |
| title_fullStr | Applications of gratings |
| title_full_unstemmed | Applications of gratings |
| title_short | Applications of gratings |
| title_sort | applications of gratings |
| topic | DRNTU::Engineering::Mechanical engineering |
| url | http://hdl.handle.net/10356/68680 |
| work_keys_str_mv | AT lixinyi applicationsofgratings |