Applications of gratings
Gratings are fundamental and important elements in optical metrology. Our particular interest involves two applications of gratings which are optical spectrometer and three-dimensional (3D) profilometer. An one-layer thin film thickness measurement system is established based on spectrometer, in...
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| Format: | Thesis |
| Language: | English |
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2016
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| Online Access: | http://hdl.handle.net/10356/68680 |