Development of a linear micro actuator for ultra-precision positioning (Vol.1)
There is a strong demand for ultra-high precision positioning devices in many modern precision machines and devices, such as hard disk drives, CD/LD devices, wafer fabrication machines, optical fibre devices and measurement/testing equipment of micro devices. The requirement for resolution or positi...
| Main Authors: | , , , , , |
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| Format: | Research Report |
| Published: |
2008
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| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/6918 |
| _version_ | 1826123814228983808 |
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| author | Du, Hejun Lim, Mong King Ling, Shih Fu Gong, Thomas Haiqing Lin, Rongming Hung, Nguyen Phu |
| author2 | Du, Hejun |
| author_facet | Du, Hejun Du, Hejun Lim, Mong King Ling, Shih Fu Gong, Thomas Haiqing Lin, Rongming Hung, Nguyen Phu |
| author_sort | Du, Hejun |
| collection | NTU |
| description | There is a strong demand for ultra-high precision positioning devices in many modern precision machines and devices, such as hard disk drives, CD/LD devices, wafer fabrication machines, optical fibre devices and measurement/testing equipment of micro devices. The requirement for resolution or positioning accuracy leaped quantumly from micron level to sub-micron, and subsequently to nano level. In addition to the ever-rising demand for high resolution, there is also strong demand for relatively large range gross motion so that the current two tiers coarse/fine positioning technology can be replaced by the more efficient single tier ultra-precision positioning actuators. Such high precision actuators of nano-level resolution can be made possible by using smart materials based actuators and microelectromechanical system (MEMS) technology. |
| first_indexed | 2024-10-01T06:10:27Z |
| format | Research Report |
| id | ntu-10356/6918 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T06:10:27Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/69182020-06-01T10:44:38Z Development of a linear micro actuator for ultra-precision positioning (Vol.1) Du, Hejun Lim, Mong King Ling, Shih Fu Gong, Thomas Haiqing Lin, Rongming Hung, Nguyen Phu Du, Hejun School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing::Product engineering There is a strong demand for ultra-high precision positioning devices in many modern precision machines and devices, such as hard disk drives, CD/LD devices, wafer fabrication machines, optical fibre devices and measurement/testing equipment of micro devices. The requirement for resolution or positioning accuracy leaped quantumly from micron level to sub-micron, and subsequently to nano level. In addition to the ever-rising demand for high resolution, there is also strong demand for relatively large range gross motion so that the current two tiers coarse/fine positioning technology can be replaced by the more efficient single tier ultra-precision positioning actuators. Such high precision actuators of nano-level resolution can be made possible by using smart materials based actuators and microelectromechanical system (MEMS) technology. 2008-09-17T14:37:00Z 2008-09-17T14:37:00Z 2002 2002 Research Report http://hdl.handle.net/10356/6918 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Manufacturing::Product engineering Du, Hejun Lim, Mong King Ling, Shih Fu Gong, Thomas Haiqing Lin, Rongming Hung, Nguyen Phu Development of a linear micro actuator for ultra-precision positioning (Vol.1) |
| title | Development of a linear micro actuator for ultra-precision positioning (Vol.1) |
| title_full | Development of a linear micro actuator for ultra-precision positioning (Vol.1) |
| title_fullStr | Development of a linear micro actuator for ultra-precision positioning (Vol.1) |
| title_full_unstemmed | Development of a linear micro actuator for ultra-precision positioning (Vol.1) |
| title_short | Development of a linear micro actuator for ultra-precision positioning (Vol.1) |
| title_sort | development of a linear micro actuator for ultra precision positioning vol 1 |
| topic | DRNTU::Engineering::Manufacturing::Product engineering |
| url | http://hdl.handle.net/10356/6918 |
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