Development of a linear micro actuator for ultra-precision positioning (Vol.1)
There is a strong demand for ultra-high precision positioning devices in many modern precision machines and devices, such as hard disk drives, CD/LD devices, wafer fabrication machines, optical fibre devices and measurement/testing equipment of micro devices. The requirement for resolution or positi...
| Main Authors: | , , , , , |
|---|---|
| Format: | Research Report |
| Published: |
2008
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/6918 |