UV laser micro-machining of MEMS
In this report, the performance of two commerically available SU-8 ultra-thick negative phtoresists, SU8-5 and SU8-50, are examined over a thickness range of 13um to 275um in a single resist spin.
| Main Authors: | , |
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| Other Authors: | |
| Format: | Research Report |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/6931 |
| _version_ | 1826122714787610624 |
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| author | Yang, Lin Jiang Gong, Thomas Haiqing |
| author2 | School of Mechanical and Production Engineering |
| author_facet | School of Mechanical and Production Engineering Yang, Lin Jiang Gong, Thomas Haiqing |
| author_sort | Yang, Lin Jiang |
| collection | NTU |
| description | In this report, the performance of two commerically available SU-8 ultra-thick negative phtoresists, SU8-5 and SU8-50, are examined over a thickness range of 13um to 275um in a single resist spin. |
| first_indexed | 2024-10-01T05:52:41Z |
| format | Research Report |
| id | ntu-10356/6931 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T05:52:41Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/69312020-06-01T10:44:40Z UV laser micro-machining of MEMS Yang, Lin Jiang Gong, Thomas Haiqing School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing In this report, the performance of two commerically available SU-8 ultra-thick negative phtoresists, SU8-5 and SU8-50, are examined over a thickness range of 13um to 275um in a single resist spin. RG 32/97 2008-09-17T14:37:23Z 2008-09-17T14:37:23Z 2002 2002 Research Report http://hdl.handle.net/10356/6931 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Manufacturing Yang, Lin Jiang Gong, Thomas Haiqing UV laser micro-machining of MEMS |
| title | UV laser micro-machining of MEMS |
| title_full | UV laser micro-machining of MEMS |
| title_fullStr | UV laser micro-machining of MEMS |
| title_full_unstemmed | UV laser micro-machining of MEMS |
| title_short | UV laser micro-machining of MEMS |
| title_sort | uv laser micro machining of mems |
| topic | DRNTU::Engineering::Manufacturing |
| url | http://hdl.handle.net/10356/6931 |
| work_keys_str_mv | AT yanglinjiang uvlasermicromachiningofmems AT gongthomashaiqing uvlasermicromachiningofmems |