Reaction micro- and nano-imprint lithography with polymers

Reaction micro- and nano-imprint lithography with polymers

The objectives of the proposed Project are as follows: a) Development of High Aspect Ratio Micro- and Nano-Imprint Lithography for patterning over large surface areas. b) Development of soft-on-hard mold technology as an enabling technology for low pressure molding of high aspect ratio polymeri...

书目详细资料
主要作者:	Chan, Mary Bee Eng.
其他作者:	School of Mechanical and Production Engineering
格式:	Research Report
出版:	2008
主题:	DRNTU::Engineering::Chemical engineering
在线阅读:	http://hdl.handle.net/10356/6969

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