Research and development of compliant micro-electro-mechanical systems (MEMS)
This project investigates the fabrication and characterization of two-dimensional resoant micromirror device actuated by sol-gel deposited PZT thin films. The piezoelectric PZT thin films with silicon micromachining technology provide the advantages of high scanning frequencies and low driving volt...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Research Report |
| Published: |
2008
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/6977 |
| _version_ | 1826110056735703040 |
|---|---|
| author | Xiao, Zhongmin |
| author2 | School of Mechanical and Production Engineering |
| author_facet | School of Mechanical and Production Engineering Xiao, Zhongmin |
| author_sort | Xiao, Zhongmin |
| collection | NTU |
| description | This project investigates the fabrication and characterization of two-dimensional resoant micromirror device actuated by sol-gel deposited PZT thin films. The piezoelectric PZT thin films with silicon micromachining technology provide the advantages of high scanning frequencies and low driving voltages. |
| first_indexed | 2024-10-01T02:28:13Z |
| format | Research Report |
| id | ntu-10356/6977 |
| institution | Nanyang Technological University |
| last_indexed | 2024-10-01T02:28:13Z |
| publishDate | 2008 |
| record_format | dspace |
| spelling | ntu-10356/69772023-03-04T18:05:47Z Research and development of compliant micro-electro-mechanical systems (MEMS) Xiao, Zhongmin School of Mechanical and Production Engineering DRNTU::Engineering::Mechanical engineering::Mechatronics This project investigates the fabrication and characterization of two-dimensional resoant micromirror device actuated by sol-gel deposited PZT thin films. The piezoelectric PZT thin films with silicon micromachining technology provide the advantages of high scanning frequencies and low driving voltages. RG 28/97 2008-09-17T14:38:34Z 2008-09-17T14:38:34Z 2001 2001 Research Report http://hdl.handle.net/10356/6977 Nanyang Technological University application/pdf |
| spellingShingle | DRNTU::Engineering::Mechanical engineering::Mechatronics Xiao, Zhongmin Research and development of compliant micro-electro-mechanical systems (MEMS) |
| title | Research and development of compliant micro-electro-mechanical systems (MEMS) |
| title_full | Research and development of compliant micro-electro-mechanical systems (MEMS) |
| title_fullStr | Research and development of compliant micro-electro-mechanical systems (MEMS) |
| title_full_unstemmed | Research and development of compliant micro-electro-mechanical systems (MEMS) |
| title_short | Research and development of compliant micro-electro-mechanical systems (MEMS) |
| title_sort | research and development of compliant micro electro mechanical systems mems |
| topic | DRNTU::Engineering::Mechanical engineering::Mechatronics |
| url | http://hdl.handle.net/10356/6977 |
| work_keys_str_mv | AT xiaozhongmin researchanddevelopmentofcompliantmicroelectromechanicalsystemsmems |