Research and development of compliant micro-electro-mechanical systems (MEMS)

Research and development of compliant micro-electro-mechanical systems (MEMS)

This project investigates the fabrication and characterization of two-dimensional resoant micromirror device actuated by sol-gel deposited PZT thin films. The piezoelectric PZT thin films with silicon micromachining technology provide the advantages of high scanning frequencies and low driving volt...

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Bibliographic Details
Main Author:	Xiao, Zhongmin
Other Authors:	School of Mechanical and Production Engineering
Format:	Research Report
Published:	2008
Subjects:	DRNTU::Engineering::Mechanical engineering::Mechatronics
Online Access:	http://hdl.handle.net/10356/6977

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