Time-frequency representation as a tool of failure detection
Chemical-Mechanical Planarization, or CMP for short, is one of the final major process involved in semiconductor company when making a microchip. In this process the chip is being made perfectly smooth and flat with the help of chemical and mechanical forces. The tool which does the planarizing proc...
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| Format: | Final Year Project (FYP) |
| Language: | English |
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2019
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| Online Access: | http://hdl.handle.net/10356/78702 |