A nanomachined tunable oscillator controlled by electrostatic and optical force

We develop a miniaturized electrostatically tunable optomechanical oscillator, whose frequencies can be electrostatically tuned by as much as 10%. By taking advantage of the optical and the electrical spring, the oscillator achieves a high tuning sensitivity without resorting to mechanical tens...

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Main Authors: Huang, J. G., Dong, B., Cai, H., Gu, Y. D., Wu, J. H., Chen, T. N., Yang, Z. C., Jin, Y. F., Hao, Y. L., Kwong, D. L., Liu, A. Q.
Other Authors: School of Electrical and Electronic Engineering
Format: Conference Paper
Language:English
Published: 2016
Subjects:
Online Access:https://hdl.handle.net/10356/81344
http://hdl.handle.net/10220/39545
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author Huang, J. G.
Dong, B.
Cai, H.
Gu, Y. D.
Wu, J. H.
Chen, T. N.
Yang, Z. C.
Jin, Y. F.
Hao, Y. L.
Kwong, D. L.
Liu, A. Q.
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Huang, J. G.
Dong, B.
Cai, H.
Gu, Y. D.
Wu, J. H.
Chen, T. N.
Yang, Z. C.
Jin, Y. F.
Hao, Y. L.
Kwong, D. L.
Liu, A. Q.
author_sort Huang, J. G.
collection NTU
description We develop a miniaturized electrostatically tunable optomechanical oscillator, whose frequencies can be electrostatically tuned by as much as 10%. By taking advantage of the optical and the electrical spring, the oscillator achieves a high tuning sensitivity without resorting to mechanical tension. Particularly, the high-Q optical cavity greatly enhances the system sensitivity, making it extremely sensitive to the motional signal, which is often overwhelmed by background noise.
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spelling ntu-10356/813442020-03-07T13:24:44Z A nanomachined tunable oscillator controlled by electrostatic and optical force Huang, J. G. Dong, B. Cai, H. Gu, Y. D. Wu, J. H. Chen, T. N. Yang, Z. C. Jin, Y. F. Hao, Y. L. Kwong, D. L. Liu, A. Q. School of Electrical and Electronic Engineering 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Tunable oscillator Optomechanical We develop a miniaturized electrostatically tunable optomechanical oscillator, whose frequencies can be electrostatically tuned by as much as 10%. By taking advantage of the optical and the electrical spring, the oscillator achieves a high tuning sensitivity without resorting to mechanical tension. Particularly, the high-Q optical cavity greatly enhances the system sensitivity, making it extremely sensitive to the motional signal, which is often overwhelmed by background noise. Accepted version 2016-01-04T07:54:43Z 2019-12-06T14:28:52Z 2016-01-04T07:54:43Z 2019-12-06T14:28:52Z 2015 Conference Paper Huang, J. G., Dong, B., Cai, H., Gu, Y. D., Wu, J. H., & Chen, T. N. (2015). A nanomachined tunable oscillator controlled by electrostatic and optical force. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 45-48. https://hdl.handle.net/10356/81344 http://hdl.handle.net/10220/39545 10.1109/MEMSYS.2015.7050882 en © 2015 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. The published version is available at: [http://dx.doi.org/10.1109/MEMSYS.2015.7050882]. 5 p. application/pdf
spellingShingle Tunable oscillator
Optomechanical
Huang, J. G.
Dong, B.
Cai, H.
Gu, Y. D.
Wu, J. H.
Chen, T. N.
Yang, Z. C.
Jin, Y. F.
Hao, Y. L.
Kwong, D. L.
Liu, A. Q.
A nanomachined tunable oscillator controlled by electrostatic and optical force
title A nanomachined tunable oscillator controlled by electrostatic and optical force
title_full A nanomachined tunable oscillator controlled by electrostatic and optical force
title_fullStr A nanomachined tunable oscillator controlled by electrostatic and optical force
title_full_unstemmed A nanomachined tunable oscillator controlled by electrostatic and optical force
title_short A nanomachined tunable oscillator controlled by electrostatic and optical force
title_sort nanomachined tunable oscillator controlled by electrostatic and optical force
topic Tunable oscillator
Optomechanical
url https://hdl.handle.net/10356/81344
http://hdl.handle.net/10220/39545
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