Highly sensitive Mach–Zehnder interferometer biosensor based on silicon nitride slot waveguide

We demonstrate a highly sensitive label-free Mach–Zehnder interferometer (MZI) biosensor based on silicon nitride slot waveguide. Unlike the conventional MZI sensors, the sensing arm of the sensor consists of a slot waveguide while the reference arm consists of a strip waveguide. Thanks to the slot...

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Main Authors: Liu, Qing, Tu, Xiaoguang, Kim, Kyung Woo, Kee, Jack Sheng, Shin, Yong, Han, Kyungsup, Yoon, Yong-Jin, Lo, Guo-Qiang, Park, Mi Kyoung
Other Authors: School of Mechanical and Aerospace Engineering
Format: Journal Article
Language:English
Published: 2016
Subjects:
Online Access:https://hdl.handle.net/10356/82022
http://hdl.handle.net/10220/41102
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author Liu, Qing
Tu, Xiaoguang
Kim, Kyung Woo
Kee, Jack Sheng
Shin, Yong
Han, Kyungsup
Yoon, Yong-Jin
Lo, Guo-Qiang
Park, Mi Kyoung
author2 School of Mechanical and Aerospace Engineering
author_facet School of Mechanical and Aerospace Engineering
Liu, Qing
Tu, Xiaoguang
Kim, Kyung Woo
Kee, Jack Sheng
Shin, Yong
Han, Kyungsup
Yoon, Yong-Jin
Lo, Guo-Qiang
Park, Mi Kyoung
author_sort Liu, Qing
collection NTU
description We demonstrate a highly sensitive label-free Mach–Zehnder interferometer (MZI) biosensor based on silicon nitride slot waveguide. Unlike the conventional MZI sensors, the sensing arm of the sensor consists of a slot waveguide while the reference arm consists of a strip waveguide. Thanks to the slot waveguide's property to provide high optical intensity in a subwavelength-size low refractive index region (slot region), which allows high light–analyte interaction, higher sensitivity can be obtained as compared to conventional waveguides using the slot waveguide as sensing region. The bulk refractive index sensitivity of the slot waveguide MZI sensor was found to be 1864π/RIU (refractive index unit) with 7 mm long slot waveguide sensing arm, which shows higher sensitivity compared to the conventional MZI device based on silicon nitride. The biosensing capability of the developed slot waveguide MZI was investigated using biotin–streptavidin binding as a model system. The sensitivity of the system was demonstrated down to 18.9 fM or 1 pg/ml of streptavidin solution and to the best of our knowledge, it is the best reported experimental value for the limit of detection of a MZI sensor. Furthermore, we investigated the specific detection and quantification of the methylation of DAPK (Death-associated protein kinase) gene, which is a widely used biomarker for human cancers. We have shown that methylation sequences of DAPK gene of various methylation densities (100%, 50%, and 0% of methylation sites) can be quantified and discriminated even at a concentration as low as 1 fmol/μl or 1 nM.
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spelling ntu-10356/820222020-03-07T13:19:19Z Highly sensitive Mach–Zehnder interferometer biosensor based on silicon nitride slot waveguide Liu, Qing Tu, Xiaoguang Kim, Kyung Woo Kee, Jack Sheng Shin, Yong Han, Kyungsup Yoon, Yong-Jin Lo, Guo-Qiang Park, Mi Kyoung School of Mechanical and Aerospace Engineering Mach–Zehnder interferometer Silicon nitride waveguide We demonstrate a highly sensitive label-free Mach–Zehnder interferometer (MZI) biosensor based on silicon nitride slot waveguide. Unlike the conventional MZI sensors, the sensing arm of the sensor consists of a slot waveguide while the reference arm consists of a strip waveguide. Thanks to the slot waveguide's property to provide high optical intensity in a subwavelength-size low refractive index region (slot region), which allows high light–analyte interaction, higher sensitivity can be obtained as compared to conventional waveguides using the slot waveguide as sensing region. The bulk refractive index sensitivity of the slot waveguide MZI sensor was found to be 1864π/RIU (refractive index unit) with 7 mm long slot waveguide sensing arm, which shows higher sensitivity compared to the conventional MZI device based on silicon nitride. The biosensing capability of the developed slot waveguide MZI was investigated using biotin–streptavidin binding as a model system. The sensitivity of the system was demonstrated down to 18.9 fM or 1 pg/ml of streptavidin solution and to the best of our knowledge, it is the best reported experimental value for the limit of detection of a MZI sensor. Furthermore, we investigated the specific detection and quantification of the methylation of DAPK (Death-associated protein kinase) gene, which is a widely used biomarker for human cancers. We have shown that methylation sequences of DAPK gene of various methylation densities (100%, 50%, and 0% of methylation sites) can be quantified and discriminated even at a concentration as low as 1 fmol/μl or 1 nM. ASTAR (Agency for Sci., Tech. and Research, S’pore) 2016-08-05T06:52:13Z 2019-12-06T14:44:53Z 2016-08-05T06:52:13Z 2019-12-06T14:44:53Z 2013 Journal Article Liu, Q., Tu, X., Kim, K. W., Kee, J. S., Shin, Y., Han, K., et al. (2013). Highly sensitive Mach–Zehnder interferometer biosensor based on silicon nitride slot waveguide. Sensors and Actuators B: Chemical, 188, 681-688. 0925-4005 https://hdl.handle.net/10356/82022 http://hdl.handle.net/10220/41102 10.1016/j.snb.2013.07.053 en Sensors and Actuators B: Chemical © 2013 Elsevier B.V. 8 p.
spellingShingle Mach–Zehnder interferometer
Silicon nitride waveguide
Liu, Qing
Tu, Xiaoguang
Kim, Kyung Woo
Kee, Jack Sheng
Shin, Yong
Han, Kyungsup
Yoon, Yong-Jin
Lo, Guo-Qiang
Park, Mi Kyoung
Highly sensitive Mach–Zehnder interferometer biosensor based on silicon nitride slot waveguide
title Highly sensitive Mach–Zehnder interferometer biosensor based on silicon nitride slot waveguide
title_full Highly sensitive Mach–Zehnder interferometer biosensor based on silicon nitride slot waveguide
title_fullStr Highly sensitive Mach–Zehnder interferometer biosensor based on silicon nitride slot waveguide
title_full_unstemmed Highly sensitive Mach–Zehnder interferometer biosensor based on silicon nitride slot waveguide
title_short Highly sensitive Mach–Zehnder interferometer biosensor based on silicon nitride slot waveguide
title_sort highly sensitive mach zehnder interferometer biosensor based on silicon nitride slot waveguide
topic Mach–Zehnder interferometer
Silicon nitride waveguide
url https://hdl.handle.net/10356/82022
http://hdl.handle.net/10220/41102
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