Large-scale high-numerical-aperture super-oscillatory lens fabricated by direct laser writing lithography
In this study, direct laser writing (DLW) lithography is employed to fabricate a large-scale and high-numerical-aperture super-oscillatory lens (SOL), which is capable of achieving a sub-Abbe–Rayleigh diffraction limit focus in the optical far-field region by delicate interference. Large-diameter (6...
| Main Authors: | , , , , , , , , , |
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| Format: | Journal Article |
| Language: | English |
| Published: |
2019
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/82503 http://hdl.handle.net/10220/48043 |
| _version_ | 1811688283494678528 |
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| author | Ni, Haibin Yuan, Guanghui Sun, Liangdong Chang, Ning Zhang, Di Chen, Ruipeng Jiang, Liyong Chen, Hongyuan Gu, Zhongze Zhao, Xiangwei |
| author2 | School of Physical and Mathematical Sciences |
| author_facet | School of Physical and Mathematical Sciences Ni, Haibin Yuan, Guanghui Sun, Liangdong Chang, Ning Zhang, Di Chen, Ruipeng Jiang, Liyong Chen, Hongyuan Gu, Zhongze Zhao, Xiangwei |
| author_sort | Ni, Haibin |
| collection | NTU |
| description | In this study, direct laser writing (DLW) lithography is employed to fabricate a large-scale and high-numerical-aperture super-oscillatory lens (SOL), which is capable of achieving a sub-Abbe–Rayleigh diffraction limit focus in the optical far-field region by delicate interference. Large-diameter (600 μm), amplitude-modulated and phase-type SOLs with the smallest annular ring width of 1 μm are fabricated, and they have high quality. The dependence of DLW printing on the fabrication parameters including substrate materials, laser power, and scanning speed is well investigated. A standard procedure to manufacture high-quality binary amplitude SOLs is presented, which avoids direct printing patterns on metal films and reduces the surface roughness dramatically. Random displacements between squares constituting SOLs are discussed, and their influence on the focusing performance is studied by both numerical simulations and experiments. The optical performances of the SOLs fabricated by the DLW method are experimentally characterized, and a needle-like focus with a spot size of 0.42λ and a depth of focus of ∼6 μm are confirmed at a working distance of 100 μm for λ = 633 nm, thus giving an effective numerical aperture as high as 1.19 in air. As a complementary sub-micrometer fabrication method between traditional lithography and nanofabrication method, DLW is proved to be a promising approach to manufacture SOLs, presenting advantages of relatively high speed, low equipment volume, less complexity and sub-micrometer lateral resolution. Such SOLs can be very useful in high resolution bio-imaging on rough surfaces and in the related research fields. |
| first_indexed | 2024-10-01T05:29:45Z |
| format | Journal Article |
| id | ntu-10356/82503 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T05:29:45Z |
| publishDate | 2019 |
| record_format | dspace |
| spelling | ntu-10356/825032023-02-28T19:22:11Z Large-scale high-numerical-aperture super-oscillatory lens fabricated by direct laser writing lithography Ni, Haibin Yuan, Guanghui Sun, Liangdong Chang, Ning Zhang, Di Chen, Ruipeng Jiang, Liyong Chen, Hongyuan Gu, Zhongze Zhao, Xiangwei School of Physical and Mathematical Sciences Diffraction Direct Laser Writing DRNTU::Science::Physics In this study, direct laser writing (DLW) lithography is employed to fabricate a large-scale and high-numerical-aperture super-oscillatory lens (SOL), which is capable of achieving a sub-Abbe–Rayleigh diffraction limit focus in the optical far-field region by delicate interference. Large-diameter (600 μm), amplitude-modulated and phase-type SOLs with the smallest annular ring width of 1 μm are fabricated, and they have high quality. The dependence of DLW printing on the fabrication parameters including substrate materials, laser power, and scanning speed is well investigated. A standard procedure to manufacture high-quality binary amplitude SOLs is presented, which avoids direct printing patterns on metal films and reduces the surface roughness dramatically. Random displacements between squares constituting SOLs are discussed, and their influence on the focusing performance is studied by both numerical simulations and experiments. The optical performances of the SOLs fabricated by the DLW method are experimentally characterized, and a needle-like focus with a spot size of 0.42λ and a depth of focus of ∼6 μm are confirmed at a working distance of 100 μm for λ = 633 nm, thus giving an effective numerical aperture as high as 1.19 in air. As a complementary sub-micrometer fabrication method between traditional lithography and nanofabrication method, DLW is proved to be a promising approach to manufacture SOLs, presenting advantages of relatively high speed, low equipment volume, less complexity and sub-micrometer lateral resolution. Such SOLs can be very useful in high resolution bio-imaging on rough surfaces and in the related research fields. ASTAR (Agency for Sci., Tech. and Research, S’pore) MOE (Min. of Education, S’pore) Published version 2019-04-17T05:59:50Z 2019-12-06T14:56:54Z 2019-04-17T05:59:50Z 2019-12-06T14:56:54Z 2018 Journal Article Ni, H., Yuan, G., Sun, L., Chang, N., Zhang, D., Chen, R., . . . Zhao, X. (2018). Large-scale high-numerical-aperture super-oscillatory lens fabricated by direct laser writing lithography. RSC Advances, 8(36), 20117-20123. doi:10.1039/c8ra02644k https://hdl.handle.net/10356/82503 http://hdl.handle.net/10220/48043 10.1039/C8RA02644K en RSC Advances © 2018 The Royal Society of Chemistry. This article is licensed under a Creative Commons Attribution-NonCommercial 3.0 Unported Licence. 7 p. application/pdf |
| spellingShingle | Diffraction Direct Laser Writing DRNTU::Science::Physics Ni, Haibin Yuan, Guanghui Sun, Liangdong Chang, Ning Zhang, Di Chen, Ruipeng Jiang, Liyong Chen, Hongyuan Gu, Zhongze Zhao, Xiangwei Large-scale high-numerical-aperture super-oscillatory lens fabricated by direct laser writing lithography |
| title | Large-scale high-numerical-aperture super-oscillatory lens fabricated by direct laser writing lithography |
| title_full | Large-scale high-numerical-aperture super-oscillatory lens fabricated by direct laser writing lithography |
| title_fullStr | Large-scale high-numerical-aperture super-oscillatory lens fabricated by direct laser writing lithography |
| title_full_unstemmed | Large-scale high-numerical-aperture super-oscillatory lens fabricated by direct laser writing lithography |
| title_short | Large-scale high-numerical-aperture super-oscillatory lens fabricated by direct laser writing lithography |
| title_sort | large scale high numerical aperture super oscillatory lens fabricated by direct laser writing lithography |
| topic | Diffraction Direct Laser Writing DRNTU::Science::Physics |
| url | https://hdl.handle.net/10356/82503 http://hdl.handle.net/10220/48043 |
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