Fabrication and Characterization of Smart Sliders with Integrated ZnO Thin-Film Sensors and Actuators
To realize higher areal densities in hard disk drive (HDD), it is necessary to decrease distance between slider and disk, i.e. flying height. The low flying height may result in severe damage occurring on the head-disk interface. Therefore, it is essential to monitor head-disk interactions to preven...
| Main Authors: | , , , |
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| Other Authors: | |
| Format: | Conference Paper |
| Language: | English |
| Published: |
2016
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| Online Access: | https://hdl.handle.net/10356/84267 http://hdl.handle.net/10220/41689 |
| _version_ | 1826124109663174656 |
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| author | Yuan, Yanhui Wong, Yoke Rung Xia, Xin Du, Hejun |
| author2 | School of Mechanical and Aerospace Engineering |
| author_facet | School of Mechanical and Aerospace Engineering Yuan, Yanhui Wong, Yoke Rung Xia, Xin Du, Hejun |
| author_sort | Yuan, Yanhui |
| collection | NTU |
| description | To realize higher areal densities in hard disk drive (HDD), it is necessary to decrease distance between slider and disk, i.e. flying height. The low flying height may result in severe damage occurring on the head-disk interface. Therefore, it is essential to monitor head-disk interactions to prevent instability and damage. In this paper, a smart slider integrated with micro-sensor and micro-actuator is proposed. The fabrication and characterization of the smart slider with integrated zinc oxide (ZnO) thin-film sensor and actuator is presented here. A possible 3D printing manufacturing approach is also proposed to replace the current complex MEMS fabrication processes for producing the smart slider. |
| first_indexed | 2024-10-01T06:15:17Z |
| format | Conference Paper |
| id | ntu-10356/84267 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T06:15:17Z |
| publishDate | 2016 |
| record_format | dspace |
| spelling | ntu-10356/842672020-09-24T20:13:01Z Fabrication and Characterization of Smart Sliders with Integrated ZnO Thin-Film Sensors and Actuators Yuan, Yanhui Wong, Yoke Rung Xia, Xin Du, Hejun School of Mechanical and Aerospace Engineering Proceedings of the 1st International Conference on Progress in Additive Manufacturing (Pro-AM 2014) Singapore Centre for 3D Printing ZnO Thin-film sensor To realize higher areal densities in hard disk drive (HDD), it is necessary to decrease distance between slider and disk, i.e. flying height. The low flying height may result in severe damage occurring on the head-disk interface. Therefore, it is essential to monitor head-disk interactions to prevent instability and damage. In this paper, a smart slider integrated with micro-sensor and micro-actuator is proposed. The fabrication and characterization of the smart slider with integrated zinc oxide (ZnO) thin-film sensor and actuator is presented here. A possible 3D printing manufacturing approach is also proposed to replace the current complex MEMS fabrication processes for producing the smart slider. Published version 2016-12-06T04:30:58Z 2019-12-06T15:41:40Z 2016-12-06T04:30:58Z 2019-12-06T15:41:40Z 2014 Conference Paper Xia, X., Du, H., Wong, Y. R., & Yuan, Y. (2014). Fabrication and Characterization of Smart Sliders with Integrated ZnO Thin-Film Sensors and Actuators. Proceedings of the 1st International Conference on Progress in Additive Manufacturing (Pro-AM 2014), 358-363. https://hdl.handle.net/10356/84267 http://hdl.handle.net/10220/41689 10.3850/978-981-09-0446-3_073 en © 2014 by Research Publishing Services. 6 p. application/pdf |
| spellingShingle | ZnO Thin-film sensor Yuan, Yanhui Wong, Yoke Rung Xia, Xin Du, Hejun Fabrication and Characterization of Smart Sliders with Integrated ZnO Thin-Film Sensors and Actuators |
| title | Fabrication and Characterization of Smart Sliders with Integrated ZnO Thin-Film Sensors and Actuators |
| title_full | Fabrication and Characterization of Smart Sliders with Integrated ZnO Thin-Film Sensors and Actuators |
| title_fullStr | Fabrication and Characterization of Smart Sliders with Integrated ZnO Thin-Film Sensors and Actuators |
| title_full_unstemmed | Fabrication and Characterization of Smart Sliders with Integrated ZnO Thin-Film Sensors and Actuators |
| title_short | Fabrication and Characterization of Smart Sliders with Integrated ZnO Thin-Film Sensors and Actuators |
| title_sort | fabrication and characterization of smart sliders with integrated zno thin film sensors and actuators |
| topic | ZnO Thin-film sensor |
| url | https://hdl.handle.net/10356/84267 http://hdl.handle.net/10220/41689 |
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