Fabrication and Characterization of Smart Sliders with Integrated ZnO Thin-Film Sensors and Actuators

Fabrication and Characterization of Smart Sliders with Integrated ZnO Thin-Film Sensors and Actuators

To realize higher areal densities in hard disk drive (HDD), it is necessary to decrease distance between slider and disk, i.e. flying height. The low flying height may result in severe damage occurring on the head-disk interface. Therefore, it is essential to monitor head-disk interactions to preven...

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Bibliographic Details
Main Authors: Yuan, Yanhui, Wong, Yoke Rung, Xia, Xin, Du, Hejun
Other Authors: School of Mechanical and Aerospace Engineering
Format: Conference Paper
Language:English
Published: 2016
Subjects:
ZnO
Thin-film sensor
Online Access:https://hdl.handle.net/10356/84267
http://hdl.handle.net/10220/41689

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