Additive Manufacturing of ZnO Thin Film for Micro Size UV Photodetector

Due to its large bandgap (3.37eV), ZnO is a suitable candidate for sensing material of UV photodetectors with great selectivity to wavelength with high radiation energy. ZnO thin film has been deposited by many methods. However, ZnO thin film created by these techniques, which is compatible with MEM...

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Bibliographic Details
Main Authors: Tran, Van-Thai, Yang, Hongyi, Wei, Yuefan, Du, Hejun
Other Authors: School of Mechanical and Aerospace Engineering
Format: Conference Paper
Language:English
Published: 2016
Subjects:
Online Access:https://hdl.handle.net/10356/84530
http://hdl.handle.net/10220/41817

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