Epitaxial BiFeO3 thin films on Si

BiFeO3 was studied as an alternative environmentally clean ferro/piezoelectric material. 200-nm-thick BiFeO3 films were grown on Si substrates with SrTiO3 as a template layer and SrRuO3 as bottom electrode. X-ray and transmission electron...

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Main Authors: Droopad, R., Yu, J., Wang, J., Zheng, H., Ma, Z., Prasertchoung, S., Wuttig, M., Eisenbeiser, K., Ramesh, R.
Other Authors: School of Materials Science & Engineering
Format: Journal Article
Language:English
Published: 2011
Subjects:
Online Access:https://hdl.handle.net/10356/85279
http://hdl.handle.net/10220/6902
_version_ 1824454372925374464
author Droopad, R.
Yu, J.
Wang, J.
Zheng, H.
Ma, Z.
Prasertchoung, S.
Wuttig, M.
Eisenbeiser, K.
Ramesh, R.
author2 School of Materials Science & Engineering
author_facet School of Materials Science & Engineering
Droopad, R.
Yu, J.
Wang, J.
Zheng, H.
Ma, Z.
Prasertchoung, S.
Wuttig, M.
Eisenbeiser, K.
Ramesh, R.
author_sort Droopad, R.
collection NTU
description BiFeO3 was studied as an alternative environmentally clean ferro/piezoelectric material. 200-nm-thick BiFeO3 films were grown on Si substrates with SrTiO3 as a template layer and SrRuO3 as bottom electrode. X-ray and transmission electron microscopy studies confirmed the epitaxial growth of the films. The spontaneous polarization of the films was ~45μC/cm2. Retention measurement up to several days showed no decay of polarization. A piezoelectric coefficient (d33) of ~60 pm/V was observed, which is promising for applications in micro-electro-mechanical systems and actuators.
first_indexed 2025-02-19T03:21:16Z
format Journal Article
id ntu-10356/85279
institution Nanyang Technological University
language English
last_indexed 2025-02-19T03:21:16Z
publishDate 2011
record_format dspace
spelling ntu-10356/852792023-07-14T15:45:33Z Epitaxial BiFeO3 thin films on Si Droopad, R. Yu, J. Wang, J. Zheng, H. Ma, Z. Prasertchoung, S. Wuttig, M. Eisenbeiser, K. Ramesh, R. School of Materials Science & Engineering DRNTU::Engineering::Electrical and electronic engineering::Microelectronics BiFeO3 was studied as an alternative environmentally clean ferro/piezoelectric material. 200-nm-thick BiFeO3 films were grown on Si substrates with SrTiO3 as a template layer and SrRuO3 as bottom electrode. X-ray and transmission electron microscopy studies confirmed the epitaxial growth of the films. The spontaneous polarization of the films was ~45μC/cm2. Retention measurement up to several days showed no decay of polarization. A piezoelectric coefficient (d33) of ~60 pm/V was observed, which is promising for applications in micro-electro-mechanical systems and actuators. Published version 2011-07-14T03:47:22Z 2019-12-06T16:00:49Z 2011-07-14T03:47:22Z 2019-12-06T16:00:49Z 2004 2004 Journal Article Wang, J., Zheng, H., Ma, Z., Prasertchoung, S., Wuttig, M., Droopad, R., et al. (2004). Epitaxial BiFeO3 Thin Films on Si. Applied Physics Letters, 85(13), 2574-2576. https://hdl.handle.net/10356/85279 http://hdl.handle.net/10220/6902 10.1063/1.1799234 en Applied physics letters © 2004 American Institute of Physics. This paper was published in Applied Physics Letters and is made available as an electronic reprint (preprint) with permission of American Institute of Physics. The paper can be found at the following DOI: http://dx.doi.org/10.1063/1.1799234. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law. 3 p. application/pdf
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Droopad, R.
Yu, J.
Wang, J.
Zheng, H.
Ma, Z.
Prasertchoung, S.
Wuttig, M.
Eisenbeiser, K.
Ramesh, R.
Epitaxial BiFeO3 thin films on Si
title Epitaxial BiFeO3 thin films on Si
title_full Epitaxial BiFeO3 thin films on Si
title_fullStr Epitaxial BiFeO3 thin films on Si
title_full_unstemmed Epitaxial BiFeO3 thin films on Si
title_short Epitaxial BiFeO3 thin films on Si
title_sort epitaxial bifeo3 thin films on si
topic DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
url https://hdl.handle.net/10356/85279
http://hdl.handle.net/10220/6902
work_keys_str_mv AT droopadr epitaxialbifeo3thinfilmsonsi
AT yuj epitaxialbifeo3thinfilmsonsi
AT wangj epitaxialbifeo3thinfilmsonsi
AT zhengh epitaxialbifeo3thinfilmsonsi
AT maz epitaxialbifeo3thinfilmsonsi
AT prasertchoungs epitaxialbifeo3thinfilmsonsi
AT wuttigm epitaxialbifeo3thinfilmsonsi
AT eisenbeiserk epitaxialbifeo3thinfilmsonsi
AT rameshr epitaxialbifeo3thinfilmsonsi