Mid-infrared sensor based on a suspended microracetrack resonator with lateral subwavelength-grating metamaterial cladding
A mid-infrared (MIR) biochemical sensor based on a one-time Si etching suspended microracetrack resonator with lateral subwavelength-grating metamaterial cladding is theoretically and experimentally demonstrated on a commercial 340-nm-thick-top-silicon silicon-on-insulator platform. The suspended st...
| Main Authors: | , , , , , , , , , , , , |
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| Format: | Journal Article |
| Language: | English |
| Published: |
2019
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| Online Access: | https://hdl.handle.net/10356/86052 http://hdl.handle.net/10220/48287 |
| _version_ | 1811689467648409600 |
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| author | Mohamed Said Rouifed Liu, Chongyang Sia, Jiaxu Zhou, Jin Littlejohns, Callum George Reed, Graham T. Wang, Hong Zhang, Zecen Ng, Geok Ing Hu, Ting Qiu, Haodong Guo, Xin Wang, Wanjun |
| author2 | School of Electrical and Electronic Engineering |
| author_facet | School of Electrical and Electronic Engineering Mohamed Said Rouifed Liu, Chongyang Sia, Jiaxu Zhou, Jin Littlejohns, Callum George Reed, Graham T. Wang, Hong Zhang, Zecen Ng, Geok Ing Hu, Ting Qiu, Haodong Guo, Xin Wang, Wanjun |
| author_sort | Mohamed Said Rouifed |
| collection | NTU |
| description | A mid-infrared (MIR) biochemical sensor based on a one-time Si etching suspended microracetrack resonator with lateral subwavelength-grating metamaterial cladding is theoretically and experimentally demonstrated on a commercial 340-nm-thick-top-silicon silicon-on-insulator platform. The suspended structure offers an increased interaction area between the mode field and the chemicals under investigation, as well as good sensitivity. The one-time Si etching process also eases the fabrication. The suspended waveguide is optimized to obtain a balance between propagation loss and sensitivity. The suspended microracetrack resonator is experimentally measured at 2 μm wavelength with an extinction ratio of 12.1 dB and a full-width at half-maximum of 0.13 nm, which corresponds to a quality factor (Q factor) of 15 300. With the equivalent refractive index method and a specially developed numerical model, the sensing performance based on the waveguide structure has been simulated and analyzed. The simulation results show that the expected sensitivity of fundamental TE mode can achieve 337.5 nm/RIU. This one-time Si etching suspended microracetrack resonator shows great potential for ultrasensitive MIR optical biochemical sensing applications. |
| first_indexed | 2024-10-01T05:48:34Z |
| format | Journal Article |
| id | ntu-10356/86052 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T05:48:34Z |
| publishDate | 2019 |
| record_format | dspace |
| spelling | ntu-10356/860522020-03-07T13:56:08Z Mid-infrared sensor based on a suspended microracetrack resonator with lateral subwavelength-grating metamaterial cladding Mohamed Said Rouifed Liu, Chongyang Sia, Jiaxu Zhou, Jin Littlejohns, Callum George Reed, Graham T. Wang, Hong Zhang, Zecen Ng, Geok Ing Hu, Ting Qiu, Haodong Guo, Xin Wang, Wanjun School of Electrical and Electronic Engineering Silicon Technologies, Centre of Excellence Silicon Nanophotonics Waveguide Devices DRNTU::Engineering::Electrical and electronic engineering A mid-infrared (MIR) biochemical sensor based on a one-time Si etching suspended microracetrack resonator with lateral subwavelength-grating metamaterial cladding is theoretically and experimentally demonstrated on a commercial 340-nm-thick-top-silicon silicon-on-insulator platform. The suspended structure offers an increased interaction area between the mode field and the chemicals under investigation, as well as good sensitivity. The one-time Si etching process also eases the fabrication. The suspended waveguide is optimized to obtain a balance between propagation loss and sensitivity. The suspended microracetrack resonator is experimentally measured at 2 μm wavelength with an extinction ratio of 12.1 dB and a full-width at half-maximum of 0.13 nm, which corresponds to a quality factor (Q factor) of 15 300. With the equivalent refractive index method and a specially developed numerical model, the sensing performance based on the waveguide structure has been simulated and analyzed. The simulation results show that the expected sensitivity of fundamental TE mode can achieve 337.5 nm/RIU. This one-time Si etching suspended microracetrack resonator shows great potential for ultrasensitive MIR optical biochemical sensing applications. NRF (Natl Research Foundation, S’pore) Accepted version 2019-05-21T04:51:05Z 2019-12-06T16:15:06Z 2019-05-21T04:51:05Z 2019-12-06T16:15:06Z 2018 Journal Article Zhang, Z., Ng, G. I., Hu, T., Qiu, H., Guo, X., Wang, W., . . . Wang, H. (2018). Mid-infrared sensor based on a suspended microracetrack resonator with lateral subwavelength-grating metamaterial cladding. IEEE Photonics Journal, 10(2), 6801608-. doi:10.1109/JPHOT.2018.2809662 1943-0655 https://hdl.handle.net/10356/86052 http://hdl.handle.net/10220/48287 10.1109/JPHOT.2018.2809662 en IEEE Photonics Journal © 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. The published version is available at: https://doi.org/10.1109/JPHOT.2018.2809662. 8 p. application/pdf |
| spellingShingle | Silicon Nanophotonics Waveguide Devices DRNTU::Engineering::Electrical and electronic engineering Mohamed Said Rouifed Liu, Chongyang Sia, Jiaxu Zhou, Jin Littlejohns, Callum George Reed, Graham T. Wang, Hong Zhang, Zecen Ng, Geok Ing Hu, Ting Qiu, Haodong Guo, Xin Wang, Wanjun Mid-infrared sensor based on a suspended microracetrack resonator with lateral subwavelength-grating metamaterial cladding |
| title | Mid-infrared sensor based on a suspended microracetrack resonator with lateral subwavelength-grating metamaterial cladding |
| title_full | Mid-infrared sensor based on a suspended microracetrack resonator with lateral subwavelength-grating metamaterial cladding |
| title_fullStr | Mid-infrared sensor based on a suspended microracetrack resonator with lateral subwavelength-grating metamaterial cladding |
| title_full_unstemmed | Mid-infrared sensor based on a suspended microracetrack resonator with lateral subwavelength-grating metamaterial cladding |
| title_short | Mid-infrared sensor based on a suspended microracetrack resonator with lateral subwavelength-grating metamaterial cladding |
| title_sort | mid infrared sensor based on a suspended microracetrack resonator with lateral subwavelength grating metamaterial cladding |
| topic | Silicon Nanophotonics Waveguide Devices DRNTU::Engineering::Electrical and electronic engineering |
| url | https://hdl.handle.net/10356/86052 http://hdl.handle.net/10220/48287 |
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