Integration of an InSb photodetector on Si via heteroepitaxy for the mid-infrared wavelength region

In this study, InSb p-i-n photodetectors with In0.82Al0.18Sb barrier layers were grown on a (100) 6° offcut Si substrate by heteroepitaxy via an AlSb/GaSb buffer. Based on an interfacial misfit array growth mode, the dislocations at the GaSb/Si and InSb/AlSb interfaces accommodated the lattice misma...

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Main Authors: Tan, Kian Hua, Loke, Wan Khai, Wicaksono, Satrio, Yoon, Soon Fatt, Jia, Bo Wen
Other Authors: School of Electrical and Electronic Engineering
Format: Journal Article
Language:English
Published: 2019
Subjects:
Online Access:https://hdl.handle.net/10356/87347
http://hdl.handle.net/10220/47599
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author Tan, Kian Hua
Loke, Wan Khai
Wicaksono, Satrio
Yoon, Soon Fatt
Jia, Bo Wen
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Tan, Kian Hua
Loke, Wan Khai
Wicaksono, Satrio
Yoon, Soon Fatt
Jia, Bo Wen
author_sort Tan, Kian Hua
collection NTU
description In this study, InSb p-i-n photodetectors with In0.82Al0.18Sb barrier layers were grown on a (100) 6° offcut Si substrate by heteroepitaxy via an AlSb/GaSb buffer. Based on an interfacial misfit array growth mode, the dislocations at the GaSb/Si and InSb/AlSb interfaces accommodated the lattice mismatch. The In0.82Al0.18Sb barrier layer increased the 77 K R0A of the detector. From 180 K to 300 K, the generation-recombination mechanism dominated the dark current generation in the detector and surface leakage became dominant below 120 K. The detector exhibited a 77 K responsivity of 0.475 A/W and a Johnson-noise-limited detectivity of 3.08 × 109 cmHz1/2W−1 at 5.3 µm.
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spelling ntu-10356/873472020-03-07T13:57:28Z Integration of an InSb photodetector on Si via heteroepitaxy for the mid-infrared wavelength region Tan, Kian Hua Loke, Wan Khai Wicaksono, Satrio Yoon, Soon Fatt Jia, Bo Wen School of Electrical and Electronic Engineering Detectors DRNTU::Engineering::Electrical and electronic engineering Infrared In this study, InSb p-i-n photodetectors with In0.82Al0.18Sb barrier layers were grown on a (100) 6° offcut Si substrate by heteroepitaxy via an AlSb/GaSb buffer. Based on an interfacial misfit array growth mode, the dislocations at the GaSb/Si and InSb/AlSb interfaces accommodated the lattice mismatch. The In0.82Al0.18Sb barrier layer increased the 77 K R0A of the detector. From 180 K to 300 K, the generation-recombination mechanism dominated the dark current generation in the detector and surface leakage became dominant below 120 K. The detector exhibited a 77 K responsivity of 0.475 A/W and a Johnson-noise-limited detectivity of 3.08 × 109 cmHz1/2W−1 at 5.3 µm. NRF (Natl Research Foundation, S’pore) Published version 2019-01-31T06:51:55Z 2019-12-06T16:40:01Z 2019-01-31T06:51:55Z 2019-12-06T16:40:01Z 2018 Journal Article Jia, B. W., Tan, K. H., Loke, W. K., Wicaksono, S., & Yoon, S. F. (2018). Integration of an InSb photodetector on Si via heteroepitaxy for the mid-infrared wavelength region. Optics Express, 26(6), 7227-. doi:10.1364/OE.26.007227 https://hdl.handle.net/10356/87347 http://hdl.handle.net/10220/47599 10.1364/OE.26.007227 en Optics Express © 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement. Users may use, reuse, and build upon the article, or use the article for text or data mining, so long as such uses are for non-commercial purposes and appropriate attribution is maintained. All other rights are reserved. 8 p. application/pdf
spellingShingle Detectors
DRNTU::Engineering::Electrical and electronic engineering
Infrared
Tan, Kian Hua
Loke, Wan Khai
Wicaksono, Satrio
Yoon, Soon Fatt
Jia, Bo Wen
Integration of an InSb photodetector on Si via heteroepitaxy for the mid-infrared wavelength region
title Integration of an InSb photodetector on Si via heteroepitaxy for the mid-infrared wavelength region
title_full Integration of an InSb photodetector on Si via heteroepitaxy for the mid-infrared wavelength region
title_fullStr Integration of an InSb photodetector on Si via heteroepitaxy for the mid-infrared wavelength region
title_full_unstemmed Integration of an InSb photodetector on Si via heteroepitaxy for the mid-infrared wavelength region
title_short Integration of an InSb photodetector on Si via heteroepitaxy for the mid-infrared wavelength region
title_sort integration of an insb photodetector on si via heteroepitaxy for the mid infrared wavelength region
topic Detectors
DRNTU::Engineering::Electrical and electronic engineering
Infrared
url https://hdl.handle.net/10356/87347
http://hdl.handle.net/10220/47599
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