Algorithm for surfaces profiles and thickness variation measurement of a transparent plate using a fizeau interferometer with wavelength tuning
An interferogram obtained from a transparent plate contains information on the profiles of both surfaces and on the thickness variation. The present work is devoted to the processing of interferograms of this type. The processing technique is based on a 36-step algorithm developed by the authors for...
| Main Authors: | , , , , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2019
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/87608 http://hdl.handle.net/10220/49298 |
| _version_ | 1811691550051139584 |
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| author | Sun, Tao Zheng, Weiwei Yu, Yingjie Yan, Ketao Asundi, Anand Valukh, Sergiy |
| author2 | School of Mechanical and Aerospace Engineering |
| author_facet | School of Mechanical and Aerospace Engineering Sun, Tao Zheng, Weiwei Yu, Yingjie Yan, Ketao Asundi, Anand Valukh, Sergiy |
| author_sort | Sun, Tao |
| collection | NTU |
| description | An interferogram obtained from a transparent plate contains information on the profiles of both surfaces and on the thickness variation. The present work is devoted to the processing of interferograms of this type. The processing technique is based on a 36-step algorithm developed by the authors for characterization of transparent plates having approximately equal reflections from both sides. The algorithm utilizes weighted multi-step phase shifting that enables one not only separately to extract the front and rear surface profiles together with the thickness variation of the tested plate but also to suppress the coupling errors between the higher harmonics and phase-shift deviation. The proposed measuring method was studied on a wavelength tunable Fizeau interferometer. The tested sample had an optical thickness and surface profile deviations equal to 0.51 µm, 1.38 µm and 0.89 µm, respectively. According to the results obtained using 10 repeated measurements, the root mean square (RMS) errors for determining both surface profiles did not exceed 1.5 nm. Experimental results show that the setup and presented 36-step algorithm are suitable for the measurement of a transparent plate of arbitrary thickness. |
| first_indexed | 2024-10-01T06:21:40Z |
| format | Journal Article |
| id | ntu-10356/87608 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T06:21:40Z |
| publishDate | 2019 |
| record_format | dspace |
| spelling | ntu-10356/876082023-03-04T17:16:22Z Algorithm for surfaces profiles and thickness variation measurement of a transparent plate using a fizeau interferometer with wavelength tuning Sun, Tao Zheng, Weiwei Yu, Yingjie Yan, Ketao Asundi, Anand Valukh, Sergiy School of Mechanical and Aerospace Engineering Wavelength Tuning Fizeau Interferometry Engineering::Mechanical engineering An interferogram obtained from a transparent plate contains information on the profiles of both surfaces and on the thickness variation. The present work is devoted to the processing of interferograms of this type. The processing technique is based on a 36-step algorithm developed by the authors for characterization of transparent plates having approximately equal reflections from both sides. The algorithm utilizes weighted multi-step phase shifting that enables one not only separately to extract the front and rear surface profiles together with the thickness variation of the tested plate but also to suppress the coupling errors between the higher harmonics and phase-shift deviation. The proposed measuring method was studied on a wavelength tunable Fizeau interferometer. The tested sample had an optical thickness and surface profile deviations equal to 0.51 µm, 1.38 µm and 0.89 µm, respectively. According to the results obtained using 10 repeated measurements, the root mean square (RMS) errors for determining both surface profiles did not exceed 1.5 nm. Experimental results show that the setup and presented 36-step algorithm are suitable for the measurement of a transparent plate of arbitrary thickness. Published version 2019-07-11T08:03:49Z 2019-12-06T16:45:33Z 2019-07-11T08:03:49Z 2019-12-06T16:45:33Z 2019 Journal Article Sun, T., Zheng, W., Yu, Y., Yan, K., Asundi, A., & Valukh, S. (2019). Algorithm for Surfaces Profiles and Thickness Variation Measurement of a Transparent Plate Using a Fizeau Interferometer with Wavelength Tuning. Applied Sciences, 9(11), 2349-. doi:10.3390/app9112349 2076-3417 https://hdl.handle.net/10356/87608 http://hdl.handle.net/10220/49298 10.3390/app9112349 en Applied Sciences © 2019 by the Authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). 14 p. application/pdf |
| spellingShingle | Wavelength Tuning Fizeau Interferometry Engineering::Mechanical engineering Sun, Tao Zheng, Weiwei Yu, Yingjie Yan, Ketao Asundi, Anand Valukh, Sergiy Algorithm for surfaces profiles and thickness variation measurement of a transparent plate using a fizeau interferometer with wavelength tuning |
| title | Algorithm for surfaces profiles and thickness variation measurement of a transparent plate using a fizeau interferometer with wavelength tuning |
| title_full | Algorithm for surfaces profiles and thickness variation measurement of a transparent plate using a fizeau interferometer with wavelength tuning |
| title_fullStr | Algorithm for surfaces profiles and thickness variation measurement of a transparent plate using a fizeau interferometer with wavelength tuning |
| title_full_unstemmed | Algorithm for surfaces profiles and thickness variation measurement of a transparent plate using a fizeau interferometer with wavelength tuning |
| title_short | Algorithm for surfaces profiles and thickness variation measurement of a transparent plate using a fizeau interferometer with wavelength tuning |
| title_sort | algorithm for surfaces profiles and thickness variation measurement of a transparent plate using a fizeau interferometer with wavelength tuning |
| topic | Wavelength Tuning Fizeau Interferometry Engineering::Mechanical engineering |
| url | https://hdl.handle.net/10356/87608 http://hdl.handle.net/10220/49298 |
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