Petri net-based efficient determination of optimal schedules for transport-dominant single-arm multi-cluster tools
It is a great challenge to find an optimal one-wafer cyclic schedule for a single-arm multicluster tool that is widely adopted in semiconductor fabrication. Aiming to tackle this significant problem, an optimal scheduling strategy is determined first for each individual tool under the condition that...
| Main Authors: | , , , , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2018
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| Online Access: | https://hdl.handle.net/10356/87749 http://hdl.handle.net/10220/45514 |
| _version_ | 1824456710231687168 |
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| author | Yang, Fajun Wu, Naiqi Qiao, Yan Zhou, Mengchu Su, Rong. Qu, Ting |
| author2 | School of Electrical and Electronic Engineering |
| author_facet | School of Electrical and Electronic Engineering Yang, Fajun Wu, Naiqi Qiao, Yan Zhou, Mengchu Su, Rong. Qu, Ting |
| author_sort | Yang, Fajun |
| collection | NTU |
| description | It is a great challenge to find an optimal one-wafer cyclic schedule for a single-arm multicluster tool that is widely adopted in semiconductor fabrication. Aiming to tackle this significant problem, an optimal scheduling strategy is determined first for each individual tool under the condition that the bottleneck individual tool is transport-bound. Then, by developing a Petri net model with robot waiting being explicitly described to reveal the properties of the entire system, this paper shows that to schedule such a tool optimally is to allocate the robot waiting time properly. Then, this paper presents the necessary and sufficient conditions for the existence of an optimal one-wafer cyclic schedule. Thereafter, an efficient algorithm is developed to check the given conditions and find such a schedule efficiently if existing. Finally, two industrial examples are used to verify that the proposed method is applicable and effective. |
| first_indexed | 2025-02-19T03:58:25Z |
| format | Journal Article |
| id | ntu-10356/87749 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2025-02-19T03:58:25Z |
| publishDate | 2018 |
| record_format | dspace |
| spelling | ntu-10356/877492020-06-10T06:27:00Z Petri net-based efficient determination of optimal schedules for transport-dominant single-arm multi-cluster tools Yang, Fajun Wu, Naiqi Qiao, Yan Zhou, Mengchu Su, Rong. Qu, Ting School of Electrical and Electronic Engineering Scheduling Petri Net It is a great challenge to find an optimal one-wafer cyclic schedule for a single-arm multicluster tool that is widely adopted in semiconductor fabrication. Aiming to tackle this significant problem, an optimal scheduling strategy is determined first for each individual tool under the condition that the bottleneck individual tool is transport-bound. Then, by developing a Petri net model with robot waiting being explicitly described to reveal the properties of the entire system, this paper shows that to schedule such a tool optimally is to allocate the robot waiting time properly. Then, this paper presents the necessary and sufficient conditions for the existence of an optimal one-wafer cyclic schedule. Thereafter, an efficient algorithm is developed to check the given conditions and find such a schedule efficiently if existing. Finally, two industrial examples are used to verify that the proposed method is applicable and effective. NRF (Natl Research Foundation, S’pore) Published version 2018-08-07T06:23:49Z 2019-12-06T16:48:37Z 2018-08-07T06:23:49Z 2019-12-06T16:48:37Z 2017 Journal Article Yang, F., Wu, N., Qiao, Y., Zhou, M., Su, R., & Qu, T. (2018). Petri net-based efficient determination of optimal schedules for transport-dominant single-arm multi-cluster tools. IEEE Access, 6, 355-365. doi: 10.1109/ACCESS.2017.2763778 2169-3536 https://hdl.handle.net/10356/87749 http://hdl.handle.net/10220/45514 10.1109/ACCESS.2017.2763778 en IEEE Access This journal is 100% open access, which means that all content is freely available without charge to users or their institutions. Articles accepted before 12 June 2019 were published under a CC BY 3.0 or the IEEE Open Access Publishing Agreement license. Questions about copyright policies or reuse rights may be directed to the IEEE Intellectual Property Rights Office at +1-732-562-3966 or copyrights@ieee.org. 11 p. application/pdf |
| spellingShingle | Scheduling Petri Net Yang, Fajun Wu, Naiqi Qiao, Yan Zhou, Mengchu Su, Rong. Qu, Ting Petri net-based efficient determination of optimal schedules for transport-dominant single-arm multi-cluster tools |
| title | Petri net-based efficient determination of optimal schedules for transport-dominant single-arm multi-cluster tools |
| title_full | Petri net-based efficient determination of optimal schedules for transport-dominant single-arm multi-cluster tools |
| title_fullStr | Petri net-based efficient determination of optimal schedules for transport-dominant single-arm multi-cluster tools |
| title_full_unstemmed | Petri net-based efficient determination of optimal schedules for transport-dominant single-arm multi-cluster tools |
| title_short | Petri net-based efficient determination of optimal schedules for transport-dominant single-arm multi-cluster tools |
| title_sort | petri net based efficient determination of optimal schedules for transport dominant single arm multi cluster tools |
| topic | Scheduling Petri Net |
| url | https://hdl.handle.net/10356/87749 http://hdl.handle.net/10220/45514 |
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