Petri net-based efficient determination of optimal schedules for transport-dominant single-arm multi-cluster tools
It is a great challenge to find an optimal one-wafer cyclic schedule for a single-arm multicluster tool that is widely adopted in semiconductor fabrication. Aiming to tackle this significant problem, an optimal scheduling strategy is determined first for each individual tool under the condition that...
| Main Authors: | , , , , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/87749 http://hdl.handle.net/10220/45514 |