Effects of substrate bias on tribological properties of diamondlike carbon thin films deposited via microwave-excited plasma-enhanced chemical vapor deposition
In this study, the structure and tribological performance of the diamondlike carbon (DLC) films were related to deposition parameters. The feasibility of the microwave-excited plasma-enhanced chemical vapor deposition (μW-PECVD) as a process to produce good quality DLC films was the focus. The DLC f...
| Main Authors: | , , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
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2018
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| Online Access: | https://hdl.handle.net/10356/87844 http://hdl.handle.net/10220/46853 |
| _version_ | 1826125049148473344 |
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| author | Neville, Anne Kolev, Ivan Zhao, Hongyuan Khun, Nay Win |
| author2 | School of Mechanical and Aerospace Engineering |
| author_facet | School of Mechanical and Aerospace Engineering Neville, Anne Kolev, Ivan Zhao, Hongyuan Khun, Nay Win |
| author_sort | Neville, Anne |
| collection | NTU |
| description | In this study, the structure and tribological performance of the diamondlike carbon (DLC) films were related to deposition parameters. The feasibility of the microwave-excited plasma-enhanced chemical vapor deposition (μW-PECVD) as a process to produce good quality DLC films was the focus. The DLC films were deposited on the steel substrates with a tungsten carbide interlayer via μW-PECVD. The negative substrate bias used during the film deposition was varied. The Raman results revealed that the increased negative substrate bias increased the sp3 bonding in the DLC films as a result of the increased kinetic energy of film-forming ions during the film deposition. The tribological results clearly indicated that the friction and wear of the DLC-coated steel samples against a 100Cr6 steel ball significantly decreased with increased negative substrate bias due to the significantly improved wear resistance of the DLC films. |
| first_indexed | 2024-10-01T06:30:23Z |
| format | Journal Article |
| id | ntu-10356/87844 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T06:30:23Z |
| publishDate | 2018 |
| record_format | dspace |
| spelling | ntu-10356/878442020-03-07T13:19:27Z Effects of substrate bias on tribological properties of diamondlike carbon thin films deposited via microwave-excited plasma-enhanced chemical vapor deposition Neville, Anne Kolev, Ivan Zhao, Hongyuan Khun, Nay Win School of Mechanical and Aerospace Engineering DRNTU::Engineering::Mechanical engineering Microwave-excited Plasma-enhanced CVD DLC Film In this study, the structure and tribological performance of the diamondlike carbon (DLC) films were related to deposition parameters. The feasibility of the microwave-excited plasma-enhanced chemical vapor deposition (μW-PECVD) as a process to produce good quality DLC films was the focus. The DLC films were deposited on the steel substrates with a tungsten carbide interlayer via μW-PECVD. The negative substrate bias used during the film deposition was varied. The Raman results revealed that the increased negative substrate bias increased the sp3 bonding in the DLC films as a result of the increased kinetic energy of film-forming ions during the film deposition. The tribological results clearly indicated that the friction and wear of the DLC-coated steel samples against a 100Cr6 steel ball significantly decreased with increased negative substrate bias due to the significantly improved wear resistance of the DLC films. 2018-12-06T07:44:21Z 2019-12-06T16:50:38Z 2018-12-06T07:44:21Z 2019-12-06T16:50:38Z 2016 Journal Article Khun, N. W., Neville, A., Kolev, I., & Zhao, H. (2016). Effects of substrate bias on tribological properties of diamondlike carbon thin films deposited via microwave-excited plasma-enhanced chemical vapor deposition. Journal of Tribology, 138(3), 031301-. doi:10.1115/1.4031995 0742-4787 https://hdl.handle.net/10356/87844 http://hdl.handle.net/10220/46853 10.1115/1.4031995 en Journal of Tribology © 2016 American Society of Mechanical Engineers (ASME). |
| spellingShingle | DRNTU::Engineering::Mechanical engineering Microwave-excited Plasma-enhanced CVD DLC Film Neville, Anne Kolev, Ivan Zhao, Hongyuan Khun, Nay Win Effects of substrate bias on tribological properties of diamondlike carbon thin films deposited via microwave-excited plasma-enhanced chemical vapor deposition |
| title | Effects of substrate bias on tribological properties of diamondlike carbon thin films deposited via microwave-excited plasma-enhanced chemical vapor deposition |
| title_full | Effects of substrate bias on tribological properties of diamondlike carbon thin films deposited via microwave-excited plasma-enhanced chemical vapor deposition |
| title_fullStr | Effects of substrate bias on tribological properties of diamondlike carbon thin films deposited via microwave-excited plasma-enhanced chemical vapor deposition |
| title_full_unstemmed | Effects of substrate bias on tribological properties of diamondlike carbon thin films deposited via microwave-excited plasma-enhanced chemical vapor deposition |
| title_short | Effects of substrate bias on tribological properties of diamondlike carbon thin films deposited via microwave-excited plasma-enhanced chemical vapor deposition |
| title_sort | effects of substrate bias on tribological properties of diamondlike carbon thin films deposited via microwave excited plasma enhanced chemical vapor deposition |
| topic | DRNTU::Engineering::Mechanical engineering Microwave-excited Plasma-enhanced CVD DLC Film |
| url | https://hdl.handle.net/10356/87844 http://hdl.handle.net/10220/46853 |
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