EUV generation by plasmonic field enhancement using nanostructures
Plasmonic field enhancement using metal nanostructures is investigated to boost the peak intensity of the incident femtosecond laser by a factor of greater than 20 dB while retaining the original ultrashort pulse dynamics. This method enables extreme ultraviolet (EUV) light generation directly from...
Main Authors: | Han, Seunghwoi, Kim, Hyunwoong, Kim, Young-Jin, Kim, Seung-Woo |
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Other Authors: | Asundi, Anand K. |
Format: | Conference Paper |
Language: | English |
Published: |
2018
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/88584 http://hdl.handle.net/10220/46952 |
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