Precision 3D surface measurement of step-structures using mode-locked femtosecond pulses
Fast, precise 3-D measurement of step-structures fabricated on microelectronic products is essential for quality assurance of semiconductor, flat panel display and photovoltaic products. Optical interferometers have long been used, but not that wide-spread for step-structures due to their phase ambi...
| Main Authors: | , , , , , |
|---|---|
| Other Authors: | |
| Format: | Conference Paper |
| Language: | English |
| Published: |
2018
|
| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/89156 http://hdl.handle.net/10220/47015 |
| _version_ | 1811686684541059072 |
|---|---|
| author | Kim, Young-Jin Choi, Minah Lee, Keunwoo Jang, Heesuk Park, Jiyong Kim, Seung-Woo |
| author2 | Tian, Ailing |
| author_facet | Tian, Ailing Kim, Young-Jin Choi, Minah Lee, Keunwoo Jang, Heesuk Park, Jiyong Kim, Seung-Woo |
| author_sort | Kim, Young-Jin |
| collection | NTU |
| description | Fast, precise 3-D measurement of step-structures fabricated on microelectronic products is essential for quality assurance of semiconductor, flat panel display and photovoltaic products. Optical interferometers have long been used, but not that wide-spread for step-structures due to their phase ambiguity or low spatial coherence. Femtosecond pulse lasers can provide novel possibilities to optical profilometry both in the time and the frequency domain. In the time domain, step-surfaces can be measured over wide area by exploiting low temporal but high spatial coherence of femtosecond pulses; in the frequency domain, multi-wavelength interferometry permits the absolute measurement over the discontinued surface profiles while maintaining the sub-wavelength measurement precision. |
| first_indexed | 2024-10-01T05:04:20Z |
| format | Conference Paper |
| id | ntu-10356/89156 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T05:04:20Z |
| publishDate | 2018 |
| record_format | dspace |
| spelling | ntu-10356/891562023-03-04T17:07:33Z Precision 3D surface measurement of step-structures using mode-locked femtosecond pulses Kim, Young-Jin Choi, Minah Lee, Keunwoo Jang, Heesuk Park, Jiyong Kim, Seung-Woo Tian, Ailing Asundi, Anand Liu, Weiguo Zhang, Chunmin School of Mechanical and Aerospace Engineering Proceedings of SPIE - The International Conference on Photonics and Optical Engineering (icPOE 2014) DRNTU::Engineering::Mechanical engineering Precision Measurement Femtosecond Laser Fast, precise 3-D measurement of step-structures fabricated on microelectronic products is essential for quality assurance of semiconductor, flat panel display and photovoltaic products. Optical interferometers have long been used, but not that wide-spread for step-structures due to their phase ambiguity or low spatial coherence. Femtosecond pulse lasers can provide novel possibilities to optical profilometry both in the time and the frequency domain. In the time domain, step-surfaces can be measured over wide area by exploiting low temporal but high spatial coherence of femtosecond pulses; in the frequency domain, multi-wavelength interferometry permits the absolute measurement over the discontinued surface profiles while maintaining the sub-wavelength measurement precision. Published version 2018-12-17T08:29:45Z 2019-12-06T17:19:07Z 2018-12-17T08:29:45Z 2019-12-06T17:19:07Z 2015 Conference Paper Kim, Y.-J., Choi, M., Lee, K., Jang, H., Park, J., & Kim, S.-W. (2015). Precision 3D surface measurement of step-structures using mode-locked femtosecond pulses. Proceedings of SPIE - The International Conference on Photonics and Optical Engineering (icPOE 2014), 9449, 94493D-. doi:10.1117/12.2083260 https://hdl.handle.net/10356/89156 http://hdl.handle.net/10220/47015 10.1117/12.2083260 en © 2015 Society of Photo-optical Instrumentation Engineers (SPIE). This paper was published in Proceedings of SPIE - The International Conference on Photonics and Optical Engineering (icPOE 2014) and is made available as an electronic reprint (preprint) with permission of Society of Photo-optical Instrumentation Engineers (SPIE). The published version is available at: [http://dx.doi.org/10.1117/12.2083260]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law. 6 p. application/pdf |
| spellingShingle | DRNTU::Engineering::Mechanical engineering Precision Measurement Femtosecond Laser Kim, Young-Jin Choi, Minah Lee, Keunwoo Jang, Heesuk Park, Jiyong Kim, Seung-Woo Precision 3D surface measurement of step-structures using mode-locked femtosecond pulses |
| title | Precision 3D surface measurement of step-structures using mode-locked femtosecond pulses |
| title_full | Precision 3D surface measurement of step-structures using mode-locked femtosecond pulses |
| title_fullStr | Precision 3D surface measurement of step-structures using mode-locked femtosecond pulses |
| title_full_unstemmed | Precision 3D surface measurement of step-structures using mode-locked femtosecond pulses |
| title_short | Precision 3D surface measurement of step-structures using mode-locked femtosecond pulses |
| title_sort | precision 3d surface measurement of step structures using mode locked femtosecond pulses |
| topic | DRNTU::Engineering::Mechanical engineering Precision Measurement Femtosecond Laser |
| url | https://hdl.handle.net/10356/89156 http://hdl.handle.net/10220/47015 |
| work_keys_str_mv | AT kimyoungjin precision3dsurfacemeasurementofstepstructuresusingmodelockedfemtosecondpulses AT choiminah precision3dsurfacemeasurementofstepstructuresusingmodelockedfemtosecondpulses AT leekeunwoo precision3dsurfacemeasurementofstepstructuresusingmodelockedfemtosecondpulses AT jangheesuk precision3dsurfacemeasurementofstepstructuresusingmodelockedfemtosecondpulses AT parkjiyong precision3dsurfacemeasurementofstepstructuresusingmodelockedfemtosecondpulses AT kimseungwoo precision3dsurfacemeasurementofstepstructuresusingmodelockedfemtosecondpulses |