Three-dimensional imaging of microstructures by an improved compact digital holographic microscope (ICDHM) with dual wavelength
An improved compact digital holographic microscope (ICDHM) is developed for three-dimensional imaging of microstructures. This system is based on lensless magnification using a diverging wave. A point source generated by a long working distance microscope objective is located into the cube beam-spli...
| Main Authors: | , , , |
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| Other Authors: | |
| Format: | Conference Paper |
| Language: | English |
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2018
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| Online Access: | https://hdl.handle.net/10356/89456 http://hdl.handle.net/10220/47091 |
| _version_ | 1824455973869191168 |
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| author | Wen, Yongfu Qu, Weijuan Cheng, Haobo Asundi, Anand |
| author2 | Asundi, Anand K. |
| author_facet | Asundi, Anand K. Wen, Yongfu Qu, Weijuan Cheng, Haobo Asundi, Anand |
| author_sort | Wen, Yongfu |
| collection | NTU |
| description | An improved compact digital holographic microscope (ICDHM) is developed for three-dimensional imaging of microstructures. This system is based on lensless magnification using a diverging wave. A point source generated by a long working distance microscope objective is located into the cube beam-splitter to get a higher numerical aperture (NA) of the system. The lateral resolution and the field-of-view of the system are confirmed with a calibration experiment. For the case of the optical path lengths (OPL) of object with step pattern larger than the wavelength, the traditional phase unwrapping algorithms cannot be unequivocally determinate, resulting in a 2π phase ambiguity. To solve this problem, dual wavelength phase unwrapping method was integrated into ICDHM, which extends the measuring capability of ICDHM over several microns of range. The experimental results demonstrate that the developed system is well suitable for the measurement of MEMS and Micro systems samples with high resolution. |
| first_indexed | 2025-02-19T03:46:43Z |
| format | Conference Paper |
| id | ntu-10356/89456 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2025-02-19T03:46:43Z |
| publishDate | 2018 |
| record_format | dspace |
| spelling | ntu-10356/894562023-03-04T17:08:14Z Three-dimensional imaging of microstructures by an improved compact digital holographic microscope (ICDHM) with dual wavelength Wen, Yongfu Qu, Weijuan Cheng, Haobo Asundi, Anand Asundi, Anand K. Fu, Yu School of Mechanical and Aerospace Engineering Proceedings of SPIE - International Conference on Optical and Photonic Engineering (icOPEN2015) DRNTU::Engineering::Mechanical engineering Digital Holography Microscopy Dual Wavelength An improved compact digital holographic microscope (ICDHM) is developed for three-dimensional imaging of microstructures. This system is based on lensless magnification using a diverging wave. A point source generated by a long working distance microscope objective is located into the cube beam-splitter to get a higher numerical aperture (NA) of the system. The lateral resolution and the field-of-view of the system are confirmed with a calibration experiment. For the case of the optical path lengths (OPL) of object with step pattern larger than the wavelength, the traditional phase unwrapping algorithms cannot be unequivocally determinate, resulting in a 2π phase ambiguity. To solve this problem, dual wavelength phase unwrapping method was integrated into ICDHM, which extends the measuring capability of ICDHM over several microns of range. The experimental results demonstrate that the developed system is well suitable for the measurement of MEMS and Micro systems samples with high resolution. NRF (Natl Research Foundation, S’pore) MOE (Min. of Education, S’pore) Published version 2018-12-19T05:33:23Z 2019-12-06T17:25:55Z 2018-12-19T05:33:23Z 2019-12-06T17:25:55Z 2015 Conference Paper Wen, Y., Qu, W., Cheng, H., & Asundi, A. (2015). Three-dimensional imaging of microstructures by an improved compact digital holographic microscope (ICDHM) with dual wavelength. Proceedings of SPIE - International Conference on Optical and Photonic Engineering (icOPEN2015), 9524, 95242M-. doi:10.1117/12.2190197 https://hdl.handle.net/10356/89456 http://hdl.handle.net/10220/47091 10.1117/12.2190197 en © 2015 Society of Photo-optical Instrumentation Engineers (SPIE). This paper was published in Proceedings of SPIE - International Conference on Optical and Photonic Engineering (icOPEN2015) and is made available as an electronic reprint (preprint) with permission of Society of Photo-optical Instrumentation Engineers (SPIE). The published version is available at: [http://dx.doi.org/10.1117/12.2190197]. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law. 7 p. application/pdf |
| spellingShingle | DRNTU::Engineering::Mechanical engineering Digital Holography Microscopy Dual Wavelength Wen, Yongfu Qu, Weijuan Cheng, Haobo Asundi, Anand Three-dimensional imaging of microstructures by an improved compact digital holographic microscope (ICDHM) with dual wavelength |
| title | Three-dimensional imaging of microstructures by an improved compact digital holographic microscope (ICDHM) with dual wavelength |
| title_full | Three-dimensional imaging of microstructures by an improved compact digital holographic microscope (ICDHM) with dual wavelength |
| title_fullStr | Three-dimensional imaging of microstructures by an improved compact digital holographic microscope (ICDHM) with dual wavelength |
| title_full_unstemmed | Three-dimensional imaging of microstructures by an improved compact digital holographic microscope (ICDHM) with dual wavelength |
| title_short | Three-dimensional imaging of microstructures by an improved compact digital holographic microscope (ICDHM) with dual wavelength |
| title_sort | three dimensional imaging of microstructures by an improved compact digital holographic microscope icdhm with dual wavelength |
| topic | DRNTU::Engineering::Mechanical engineering Digital Holography Microscopy Dual Wavelength |
| url | https://hdl.handle.net/10356/89456 http://hdl.handle.net/10220/47091 |
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