A thermal study of amorphous and textured carbon and carbon nitride thin films via transient grating spectroscopy

In this study, we are considering a novel way of growing carbon nitride (CN) films by using High Power Impulse Magnetron Sputtering (HiPIMS). Carbon and CN thin films were grown on silicon substrate with varying nanocrystalline texturing: some samples were amorphous while others were either nanocrys...

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Main Authors: Cometto, Olivier, Dennett, Cody A., Tsang, Siu Hon, Short, Michael P., Teo, Edwin Hang Tong
Other Authors: School of Electrical and Electronic Engineering
Format: Journal Article
Language:English
Published: 2018
Subjects:
Online Access:https://hdl.handle.net/10356/89517
http://hdl.handle.net/10220/44975
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author Cometto, Olivier
Dennett, Cody A.
Tsang, Siu Hon
Short, Michael P.
Teo, Edwin Hang Tong
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Cometto, Olivier
Dennett, Cody A.
Tsang, Siu Hon
Short, Michael P.
Teo, Edwin Hang Tong
author_sort Cometto, Olivier
collection NTU
description In this study, we are considering a novel way of growing carbon nitride (CN) films by using High Power Impulse Magnetron Sputtering (HiPIMS). Carbon and CN thin films were grown on silicon substrate with varying nanocrystalline texturing: some samples were amorphous while others were either nanocrystalline graphite (for the carbon sample) or fullerene-like (for the CN sample), with both samples having a graphitic nanostructure vertically ordered throughout the film. Their thermal diffusivity was computed using transient grating spectroscopy in order to compare the impact of the material's nanostructure on its thermal property as well as benchmarking the performance of CN. It was found that the thermal properties of carbon thin films were decreased when doped with nitrogen, which is attributed to the increased atomic disorder introduced by the nitrogen cross-linking, impacting the phonon propagation. The impact of nitrogen doping on thermal properties opens new avenues in engineering materials with tailored and varying thermal properties at the microscale.
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spelling ntu-10356/895172020-09-26T22:19:17Z A thermal study of amorphous and textured carbon and carbon nitride thin films via transient grating spectroscopy Cometto, Olivier Dennett, Cody A. Tsang, Siu Hon Short, Michael P. Teo, Edwin Hang Tong School of Electrical and Electronic Engineering Research Techno Plaza Temasek Laboratories Carbon Nitride HiPIMS In this study, we are considering a novel way of growing carbon nitride (CN) films by using High Power Impulse Magnetron Sputtering (HiPIMS). Carbon and CN thin films were grown on silicon substrate with varying nanocrystalline texturing: some samples were amorphous while others were either nanocrystalline graphite (for the carbon sample) or fullerene-like (for the CN sample), with both samples having a graphitic nanostructure vertically ordered throughout the film. Their thermal diffusivity was computed using transient grating spectroscopy in order to compare the impact of the material's nanostructure on its thermal property as well as benchmarking the performance of CN. It was found that the thermal properties of carbon thin films were decreased when doped with nitrogen, which is attributed to the increased atomic disorder introduced by the nitrogen cross-linking, impacting the phonon propagation. The impact of nitrogen doping on thermal properties opens new avenues in engineering materials with tailored and varying thermal properties at the microscale. NRF (Natl Research Foundation, S’pore) Accepted version 2018-06-06T06:41:54Z 2019-12-06T17:27:27Z 2018-06-06T06:41:54Z 2019-12-06T17:27:27Z 2018 Journal Article Cometto, O., Dennett, C. A., Tsang, S. H., Short, M. P.,& Teo, E. H. T. (2018). A thermal study of amorphous and textured carbon and carbon nitride thin films via transient grating spectroscopy. Carbon, 130, 355-361. doi:10.1016/j.carbon.2018.01.025 0008-6223 https://hdl.handle.net/10356/89517 http://hdl.handle.net/10220/44975 10.1016/j.carbon.2018.01.025 130 355 361 en Carbon Carbon © 2018 Elsevier Ltd. application/pdf
spellingShingle Carbon Nitride
HiPIMS
Cometto, Olivier
Dennett, Cody A.
Tsang, Siu Hon
Short, Michael P.
Teo, Edwin Hang Tong
A thermal study of amorphous and textured carbon and carbon nitride thin films via transient grating spectroscopy
title A thermal study of amorphous and textured carbon and carbon nitride thin films via transient grating spectroscopy
title_full A thermal study of amorphous and textured carbon and carbon nitride thin films via transient grating spectroscopy
title_fullStr A thermal study of amorphous and textured carbon and carbon nitride thin films via transient grating spectroscopy
title_full_unstemmed A thermal study of amorphous and textured carbon and carbon nitride thin films via transient grating spectroscopy
title_short A thermal study of amorphous and textured carbon and carbon nitride thin films via transient grating spectroscopy
title_sort thermal study of amorphous and textured carbon and carbon nitride thin films via transient grating spectroscopy
topic Carbon Nitride
HiPIMS
url https://hdl.handle.net/10356/89517
http://hdl.handle.net/10220/44975
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