Requirement for accurate interconnect temperature measurement for electromigration test
In this work, we show accurate temperature measurement is important in electromigration (EM) test as it can affect the measured activation energy EA and current density exponent n. The deviation of measured EA and n due to the interconnect...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Conference Paper |
| Language: | English |
| Published: |
2010
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/90755 http://hdl.handle.net/10220/6394 http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=5403696 |