The use of circular optical grating for measuring angular rotation of mirrors
This paper explores the feasible use of circular optical grating for measuring the rotation of mirrors that are commonly found in micro-systems. Both theoretical and experimental results show that distortion of the circular grating that is projected onto the mirror surface is a simple function of...
| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2011
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/91296 http://hdl.handle.net/10220/6701 |
| _version_ | 1811693123383853056 |
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| author | Shang, H. M. Toh, S. L. Quan, Chenggen Tay, Cho Jui Fu, Yu |
| author2 | Temasek Laboratories |
| author_facet | Temasek Laboratories Shang, H. M. Toh, S. L. Quan, Chenggen Tay, Cho Jui Fu, Yu |
| author_sort | Shang, H. M. |
| collection | NTU |
| description | This paper explores the feasible use of circular optical grating for measuring the rotation of mirrors that are commonly found in micro-systems. Both theoretical and
experimental results show that distortion of the circular grating that is projected onto the mirror surface is a simple function of the angular rotation of the mirror. The circular grating may readily be generated using a standard Michelson interferometer or an LCD projector. Through manipulating the distance between the interferometer and the mirror
surface, the diameter of the optical grating may be varied. Furthermore, the additional use
of a converging lens enables a significant reduction in the size of the grating: with simple laboratory facility, small circular grating of about 400 μm is achieved for use on microsystems.
With the use of more sophisticated optical elements, the angular rotation of even smaller micro-mirrors may be measured. |
| first_indexed | 2024-10-01T06:46:40Z |
| format | Journal Article |
| id | ntu-10356/91296 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T06:46:40Z |
| publishDate | 2011 |
| record_format | dspace |
| spelling | ntu-10356/912962021-01-06T02:48:57Z The use of circular optical grating for measuring angular rotation of mirrors Shang, H. M. Toh, S. L. Quan, Chenggen Tay, Cho Jui Fu, Yu Temasek Laboratories DRNTU::Science::Physics::Optics and light This paper explores the feasible use of circular optical grating for measuring the rotation of mirrors that are commonly found in micro-systems. Both theoretical and experimental results show that distortion of the circular grating that is projected onto the mirror surface is a simple function of the angular rotation of the mirror. The circular grating may readily be generated using a standard Michelson interferometer or an LCD projector. Through manipulating the distance between the interferometer and the mirror surface, the diameter of the optical grating may be varied. Furthermore, the additional use of a converging lens enables a significant reduction in the size of the grating: with simple laboratory facility, small circular grating of about 400 μm is achieved for use on microsystems. With the use of more sophisticated optical elements, the angular rotation of even smaller micro-mirrors may be measured. Accepted version 2011-01-25T07:25:41Z 2019-12-06T18:03:08Z 2011-01-25T07:25:41Z 2019-12-06T18:03:08Z 2001 2001 Journal Article Shang, H. M., Toh, S. L., Fu, Y., Quan, C., & Tay, C. J. (2001). The use of circular optical grating for measuring angular rotation of mirrors. Optics and Lasers in Engineering, 36(5), 487-500. 0143-8166 https://hdl.handle.net/10356/91296 http://hdl.handle.net/10220/6701 10.1016/S0143-8166(01)00074-4 en Optics and Lasers in Engineering Optics and lasers in engineering This is the author created version of a work that has been peer reviewed and accepted for publication by Optics and Lasers in Engineering, Elsevier. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [DOI:http://dx.doi.org/doi:10.1016/S0143-8166(01)00074-4]. application/pdf |
| spellingShingle | DRNTU::Science::Physics::Optics and light Shang, H. M. Toh, S. L. Quan, Chenggen Tay, Cho Jui Fu, Yu The use of circular optical grating for measuring angular rotation of mirrors |
| title | The use of circular optical grating for measuring angular rotation of mirrors |
| title_full | The use of circular optical grating for measuring angular rotation of mirrors |
| title_fullStr | The use of circular optical grating for measuring angular rotation of mirrors |
| title_full_unstemmed | The use of circular optical grating for measuring angular rotation of mirrors |
| title_short | The use of circular optical grating for measuring angular rotation of mirrors |
| title_sort | use of circular optical grating for measuring angular rotation of mirrors |
| topic | DRNTU::Science::Physics::Optics and light |
| url | https://hdl.handle.net/10356/91296 http://hdl.handle.net/10220/6701 |
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