A fully polymeric micropump with piezoelectric actuator
This paper presents a new concept of designing and fabricating polymeric micropumps. The micro pump is made of SU-8 photoresist and polymethylmethacrylate (PMMA). The key elements of the micropump are the micro check valves, which are fabricated in a 100-μm-thick SU-8 film. The SU-8 part is designed...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2012
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/93888 http://hdl.handle.net/10220/7808 |