Characterization of MEMS cantilevers using lensless digital holographic microscope

Characterization of MEMS cantilevers using lensless digital holographic microscope

In this paper vibration characterization of MEMS cantilevers are presented using lens-less in-line digital holographic microscope (LDHM). In-line digital holography provides larger information capability with higher phase sensitivity, and full CCD sensor area is utilized for real image reconstructio...

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Bibliographic Details
Main Authors: Andrei, Alexandru, Gorecki, Cristophe, Nieradko, Lukasz, Singh, Vijay Raj, Anand, Asundi
Other Authors: School of Mechanical and Aerospace Engineering
Format: Conference Paper
Language:English
Published: 2011
Subjects:
DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
Online Access:https://hdl.handle.net/10356/94145
http://hdl.handle.net/10220/7239

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