Electromechanical properties and fatigue of antiferroelectric (Pb, La) (Zr, Sn, Ti)O3 thin film cantilevers fabricated by micromachining
Electromechanical cantilevers comprising antiferroelectric (Pb, La) (Zr, Sn, Ti)O3 (PLZST) thin films were fabricated through bulk micro-machining process on silicon wafers, and their electromechanical properties including strain-fatigue behaviors of the antiferroelectric thin film cantilevers were...
| Main Authors: | , , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2013
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| Online Access: | https://hdl.handle.net/10356/95138 http://hdl.handle.net/10220/9397 |
| _version_ | 1826114877068935168 |
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| author | Yao, Kui Sritharan, Thirumany Mirshekarloo, Meysam Sharifzadeh Zhang, Lei |
| author2 | School of Materials Science & Engineering |
| author_facet | School of Materials Science & Engineering Yao, Kui Sritharan, Thirumany Mirshekarloo, Meysam Sharifzadeh Zhang, Lei |
| author_sort | Yao, Kui |
| collection | NTU |
| description | Electromechanical cantilevers comprising antiferroelectric (Pb, La) (Zr, Sn, Ti)O3 (PLZST) thin films were fabricated through bulk micro-machining process on silicon wafers, and their electromechanical properties including strain-fatigue behaviors of the antiferroelectric thin film cantilevers were investigated. The antiferroelectric cantilevers showed the distinct digital actuation characteristics with the strain generated due to the antiferroelectric–ferroelectric transformation. The maximum displacement per unit voltage around the phase switching field reached 16.7 μm/V, significantly larger than the typical piezoelectric cantilevers. Moreover, the antiferroelectric PLZST cantilevers exhibited superior strain-fatigue resistance compared to the similar piezoelectric microstructures. These results show the promising future of antiferroelectric materials in micro electromechanical systems. |
| first_indexed | 2024-10-01T03:46:22Z |
| format | Journal Article |
| id | ntu-10356/95138 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T03:46:22Z |
| publishDate | 2013 |
| record_format | dspace |
| spelling | ntu-10356/951382023-07-14T15:57:36Z Electromechanical properties and fatigue of antiferroelectric (Pb, La) (Zr, Sn, Ti)O3 thin film cantilevers fabricated by micromachining Yao, Kui Sritharan, Thirumany Mirshekarloo, Meysam Sharifzadeh Zhang, Lei School of Materials Science & Engineering Electromechanical cantilevers comprising antiferroelectric (Pb, La) (Zr, Sn, Ti)O3 (PLZST) thin films were fabricated through bulk micro-machining process on silicon wafers, and their electromechanical properties including strain-fatigue behaviors of the antiferroelectric thin film cantilevers were investigated. The antiferroelectric cantilevers showed the distinct digital actuation characteristics with the strain generated due to the antiferroelectric–ferroelectric transformation. The maximum displacement per unit voltage around the phase switching field reached 16.7 μm/V, significantly larger than the typical piezoelectric cantilevers. Moreover, the antiferroelectric PLZST cantilevers exhibited superior strain-fatigue resistance compared to the similar piezoelectric microstructures. These results show the promising future of antiferroelectric materials in micro electromechanical systems. Accepted version 2013-03-13T08:17:17Z 2019-12-06T19:09:00Z 2013-03-13T08:17:17Z 2019-12-06T19:09:00Z 2012 2012 Journal Article Mirshekarloo, M. S., Zhang, L., Yao, K., & Sritharan, T. (2012). Electromechanical properties and fatigue of antiferroelectric (Pb, La) (Zr, Sn, Ti)O3 thin film cantilevers fabricated by micromachining. Sensors and Actuators A: Physical, 187, 127-131. 0924-4247 https://hdl.handle.net/10356/95138 http://hdl.handle.net/10220/9397 10.1016/j.sna.2012.08.024 en Sensors and Actuators A: Physical © 2012 Elsevier B.V. This is the author created version of a work that has been peer reviewed and accepted for publication by Sensors and Actuators A: Physical, Elsevier B.V. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [http://dx.doi.org/10.1016/j.sna.2012.08.024]. application/pdf |
| spellingShingle | Yao, Kui Sritharan, Thirumany Mirshekarloo, Meysam Sharifzadeh Zhang, Lei Electromechanical properties and fatigue of antiferroelectric (Pb, La) (Zr, Sn, Ti)O3 thin film cantilevers fabricated by micromachining |
| title | Electromechanical properties and fatigue of antiferroelectric (Pb, La) (Zr, Sn, Ti)O3 thin film cantilevers fabricated by micromachining |
| title_full | Electromechanical properties and fatigue of antiferroelectric (Pb, La) (Zr, Sn, Ti)O3 thin film cantilevers fabricated by micromachining |
| title_fullStr | Electromechanical properties and fatigue of antiferroelectric (Pb, La) (Zr, Sn, Ti)O3 thin film cantilevers fabricated by micromachining |
| title_full_unstemmed | Electromechanical properties and fatigue of antiferroelectric (Pb, La) (Zr, Sn, Ti)O3 thin film cantilevers fabricated by micromachining |
| title_short | Electromechanical properties and fatigue of antiferroelectric (Pb, La) (Zr, Sn, Ti)O3 thin film cantilevers fabricated by micromachining |
| title_sort | electromechanical properties and fatigue of antiferroelectric pb la zr sn ti o3 thin film cantilevers fabricated by micromachining |
| url | https://hdl.handle.net/10356/95138 http://hdl.handle.net/10220/9397 |
| work_keys_str_mv | AT yaokui electromechanicalpropertiesandfatigueofantiferroelectricpblazrsntio3thinfilmcantileversfabricatedbymicromachining AT sritharanthirumany electromechanicalpropertiesandfatigueofantiferroelectricpblazrsntio3thinfilmcantileversfabricatedbymicromachining AT mirshekarloomeysamsharifzadeh electromechanicalpropertiesandfatigueofantiferroelectricpblazrsntio3thinfilmcantileversfabricatedbymicromachining AT zhanglei electromechanicalpropertiesandfatigueofantiferroelectricpblazrsntio3thinfilmcantileversfabricatedbymicromachining |