Interfacial-layer-free growth of yttrium oxide on germanium by understanding initial surface reactions
In this study, we investigate the surface and interfacial reactions involved in the growth of yttrium oxide through the oxidation of yttrium metal on germanium. Our combined understanding of the oxidation and interfacial reactions allows us to introduce a layer-by-layer method to grow an interfacial...
| Main Authors: | , , , , , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2013
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| Online Access: | https://hdl.handle.net/10356/95823 http://hdl.handle.net/10220/11912 |
| _version_ | 1811681368002789376 |
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| author | Liu, Z. Q. Chim, W. K. Pan, J. S. Chun, S. R. Liu, Q. Ng, C. M. Chiam, Sing Yang |
| author2 | School of Materials Science & Engineering |
| author_facet | School of Materials Science & Engineering Liu, Z. Q. Chim, W. K. Pan, J. S. Chun, S. R. Liu, Q. Ng, C. M. Chiam, Sing Yang |
| author_sort | Liu, Z. Q. |
| collection | NTU |
| description | In this study, we investigate the surface and interfacial reactions involved in the growth of yttrium oxide through the oxidation of yttrium metal on germanium. Our combined understanding of the oxidation and interfacial reactions allows us to introduce a layer-by-layer method to grow an interfacial-layer-free yttrium oxide on germanium at room temperature, which has previously proven to be difficult. During initial growth, we show evidence that yttrium germanide provides the lowest kinetic pathway in the formation of the yttrium germanate interfacial layer and explain how this pathway can be avoided using our layer-by-layer method. This method can possibly be used to achieve interfacial-layer-free growth for other metal oxides on semiconductors. |
| first_indexed | 2024-10-01T03:39:50Z |
| format | Journal Article |
| id | ntu-10356/95823 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T03:39:50Z |
| publishDate | 2013 |
| record_format | dspace |
| spelling | ntu-10356/958232020-06-01T10:13:48Z Interfacial-layer-free growth of yttrium oxide on germanium by understanding initial surface reactions Liu, Z. Q. Chim, W. K. Pan, J. S. Chun, S. R. Liu, Q. Ng, C. M. Chiam, Sing Yang School of Materials Science & Engineering Temasek Laboratories In this study, we investigate the surface and interfacial reactions involved in the growth of yttrium oxide through the oxidation of yttrium metal on germanium. Our combined understanding of the oxidation and interfacial reactions allows us to introduce a layer-by-layer method to grow an interfacial-layer-free yttrium oxide on germanium at room temperature, which has previously proven to be difficult. During initial growth, we show evidence that yttrium germanide provides the lowest kinetic pathway in the formation of the yttrium germanate interfacial layer and explain how this pathway can be avoided using our layer-by-layer method. This method can possibly be used to achieve interfacial-layer-free growth for other metal oxides on semiconductors. 2013-07-22T02:28:21Z 2019-12-06T19:22:03Z 2013-07-22T02:28:21Z 2019-12-06T19:22:03Z 2012 2012 Journal Article Liu, Z. Q., Chim, W. K., Chiam, S. Y., Pan, J. S., Chun, S. R., Liu, Q., et al. (2012). Interfacial-layer-free growth of yttrium oxide on germanium by understanding initial surface reactions. Surface Science, 606(21-22), 1638-1642. 0039-6028 https://hdl.handle.net/10356/95823 http://hdl.handle.net/10220/11912 10.1016/j.susc.2012.07.007 en Surface science © 2012 Elsevier B.V. |
| spellingShingle | Liu, Z. Q. Chim, W. K. Pan, J. S. Chun, S. R. Liu, Q. Ng, C. M. Chiam, Sing Yang Interfacial-layer-free growth of yttrium oxide on germanium by understanding initial surface reactions |
| title | Interfacial-layer-free growth of yttrium oxide on germanium by understanding initial surface reactions |
| title_full | Interfacial-layer-free growth of yttrium oxide on germanium by understanding initial surface reactions |
| title_fullStr | Interfacial-layer-free growth of yttrium oxide on germanium by understanding initial surface reactions |
| title_full_unstemmed | Interfacial-layer-free growth of yttrium oxide on germanium by understanding initial surface reactions |
| title_short | Interfacial-layer-free growth of yttrium oxide on germanium by understanding initial surface reactions |
| title_sort | interfacial layer free growth of yttrium oxide on germanium by understanding initial surface reactions |
| url | https://hdl.handle.net/10356/95823 http://hdl.handle.net/10220/11912 |
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