Effect of residual stresses in injection molded cyclic olefin copolymer during microfabrication : hot embossing as well as thermal bonding
Microfabrication using replication techniques such as hot embossing and injection molding followed by thermal sealing with a cover plate have been widely used in the large scale manufacturing of polymer based micro-devices for bio and chemical-MEMS (Micro Electro Mechanical Systems) applications. Wh...
| Main Authors: | , , , |
|---|---|
| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2013
|
| Online Access: | https://hdl.handle.net/10356/97196 http://hdl.handle.net/10220/10594 |