Air-gapped microcoxial transmission line for ultrawide band microwave and millimeter wave ICS
We present an air-gapped microcoaxial transmission line fabricated on low resistivity silicon substrate (ρ = 10 Ω·cm). The transmission line is based on a damascene copper process and has demonstrated superior microwave properties of low attenuation (<0.02 dB/mm) and a low and constant effective...
| Main Authors: | , , |
|---|---|
| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2014
|
| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/97539 http://hdl.handle.net/10220/19655 |
| _version_ | 1811693929795420160 |
|---|---|
| author | Tian, Yang Lee, Kokyan Wang, Hong |
| author2 | School of Electrical and Electronic Engineering |
| author_facet | School of Electrical and Electronic Engineering Tian, Yang Lee, Kokyan Wang, Hong |
| author_sort | Tian, Yang |
| collection | NTU |
| description | We present an air-gapped microcoaxial transmission line fabricated on low resistivity silicon substrate (ρ = 10 Ω·cm). The transmission line is based on a damascene copper process and has demonstrated superior microwave properties of low attenuation (<0.02 dB/mm) and a low and constant effective permittivity (∼1.02) in the frequency range of 0.1–40 GHz. The fabrication process has a low thermal budget, and can be easily integrated with the advanced Cu back-end-of-line CMOS to fabricate low-loss and high quality factor microwave and millimeter wave passives for system-on-chip applications. |
| first_indexed | 2024-10-01T06:59:30Z |
| format | Journal Article |
| id | ntu-10356/97539 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T06:59:30Z |
| publishDate | 2014 |
| record_format | dspace |
| spelling | ntu-10356/975392020-03-07T12:47:16Z Air-gapped microcoxial transmission line for ultrawide band microwave and millimeter wave ICS Tian, Yang Lee, Kokyan Wang, Hong School of Electrical and Electronic Engineering Temasek Laboratories DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio We present an air-gapped microcoaxial transmission line fabricated on low resistivity silicon substrate (ρ = 10 Ω·cm). The transmission line is based on a damascene copper process and has demonstrated superior microwave properties of low attenuation (<0.02 dB/mm) and a low and constant effective permittivity (∼1.02) in the frequency range of 0.1–40 GHz. The fabrication process has a low thermal budget, and can be easily integrated with the advanced Cu back-end-of-line CMOS to fabricate low-loss and high quality factor microwave and millimeter wave passives for system-on-chip applications. 2014-06-11T04:23:10Z 2019-12-06T19:43:42Z 2014-06-11T04:23:10Z 2019-12-06T19:43:42Z 2014 2014 Journal Article Tian, Y., Lee, K., & Wang, H. (2014). Air-gapped microcoxial transmission line for ultrawide band microwave and millimeter wave ICS. Microwave and Optical Technology Letters, 56(6), 1462-1465. 0895-2477 https://hdl.handle.net/10356/97539 http://hdl.handle.net/10220/19655 10.1002/mop.28326 en Microwave and optical technology letters © 2014 Wiley Periodicals, Inc. |
| spellingShingle | DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio Tian, Yang Lee, Kokyan Wang, Hong Air-gapped microcoxial transmission line for ultrawide band microwave and millimeter wave ICS |
| title | Air-gapped microcoxial transmission line for ultrawide band microwave and millimeter wave ICS |
| title_full | Air-gapped microcoxial transmission line for ultrawide band microwave and millimeter wave ICS |
| title_fullStr | Air-gapped microcoxial transmission line for ultrawide band microwave and millimeter wave ICS |
| title_full_unstemmed | Air-gapped microcoxial transmission line for ultrawide band microwave and millimeter wave ICS |
| title_short | Air-gapped microcoxial transmission line for ultrawide band microwave and millimeter wave ICS |
| title_sort | air gapped microcoxial transmission line for ultrawide band microwave and millimeter wave ics |
| topic | DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio |
| url | https://hdl.handle.net/10356/97539 http://hdl.handle.net/10220/19655 |
| work_keys_str_mv | AT tianyang airgappedmicrocoxialtransmissionlineforultrawidebandmicrowaveandmillimeterwaveics AT leekokyan airgappedmicrocoxialtransmissionlineforultrawidebandmicrowaveandmillimeterwaveics AT wanghong airgappedmicrocoxialtransmissionlineforultrawidebandmicrowaveandmillimeterwaveics |