Studies on the transitional behaviors of Au-to-Au micro-contact during the initialization stage of contact formation under low contact force

In nowadays, ohmic-contact MEMS switches have been widely studied due to their variously advantages, such as high isolation, low insertion loss, negligible power consumption and so on. The micro-contact behavior has been analyzed by several researchers using the conventional asperity deformation mod...

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Main Authors: Qiu, Haodong, Wang, Hong, Ke, Feixiang
Other Authors: School of Electrical and Electronic Engineering
Format: Conference Paper
Language:English
Published: 2013
Subjects:
Online Access:https://hdl.handle.net/10356/97581
http://hdl.handle.net/10220/11820
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author Qiu, Haodong
Wang, Hong
Ke, Feixiang
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Qiu, Haodong
Wang, Hong
Ke, Feixiang
author_sort Qiu, Haodong
collection NTU
description In nowadays, ohmic-contact MEMS switches have been widely studied due to their variously advantages, such as high isolation, low insertion loss, negligible power consumption and so on. The micro-contact behavior has been analyzed by several researchers using the conventional asperity deformation model, in which the electrical contact resistance decreases gradually with increasing contact force and finally reaches a saturation region. This paper presents a study of the instable region of micro-contact behaviors under low contact force and low current conditions, where the conventional model does not seems to be applicable. Random telegraph signals (RTS) were captured during the transition period before the establishment of stable electrical contact. An electrothermal approach was applied in our work and the time constants of the RTS during instable region are extracted statistically from the experimental data. The fundamental mechanism for the contact resistance instabilities were discussed under the framework of material transfer enhanced by localized Joule heating.
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spelling ntu-10356/975812020-03-07T13:24:47Z Studies on the transitional behaviors of Au-to-Au micro-contact during the initialization stage of contact formation under low contact force Qiu, Haodong Wang, Hong Ke, Feixiang School of Electrical and Electronic Engineering International Conference on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (13th : 2012 : Cascais, Portugal) Research Techno Plaza Temasek Laboratories DRNTU::Engineering::Electrical and electronic engineering In nowadays, ohmic-contact MEMS switches have been widely studied due to their variously advantages, such as high isolation, low insertion loss, negligible power consumption and so on. The micro-contact behavior has been analyzed by several researchers using the conventional asperity deformation model, in which the electrical contact resistance decreases gradually with increasing contact force and finally reaches a saturation region. This paper presents a study of the instable region of micro-contact behaviors under low contact force and low current conditions, where the conventional model does not seems to be applicable. Random telegraph signals (RTS) were captured during the transition period before the establishment of stable electrical contact. An electrothermal approach was applied in our work and the time constants of the RTS during instable region are extracted statistically from the experimental data. The fundamental mechanism for the contact resistance instabilities were discussed under the framework of material transfer enhanced by localized Joule heating. 2013-07-18T02:14:04Z 2019-12-06T19:44:17Z 2013-07-18T02:14:04Z 2019-12-06T19:44:17Z 2012 2012 Conference Paper Qiu, H., Wang, H., & Ke, F. (2012). Studies on the transitional behaviors of Au-to-Au micro-contact during the initialization stage of contact formation under low contact force. 2012 13th International Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems(EuroSimE). https://hdl.handle.net/10356/97581 http://hdl.handle.net/10220/11820 10.1109/ESimE.2012.6191804 en © 2012 IEEE.
spellingShingle DRNTU::Engineering::Electrical and electronic engineering
Qiu, Haodong
Wang, Hong
Ke, Feixiang
Studies on the transitional behaviors of Au-to-Au micro-contact during the initialization stage of contact formation under low contact force
title Studies on the transitional behaviors of Au-to-Au micro-contact during the initialization stage of contact formation under low contact force
title_full Studies on the transitional behaviors of Au-to-Au micro-contact during the initialization stage of contact formation under low contact force
title_fullStr Studies on the transitional behaviors of Au-to-Au micro-contact during the initialization stage of contact formation under low contact force
title_full_unstemmed Studies on the transitional behaviors of Au-to-Au micro-contact during the initialization stage of contact formation under low contact force
title_short Studies on the transitional behaviors of Au-to-Au micro-contact during the initialization stage of contact formation under low contact force
title_sort studies on the transitional behaviors of au to au micro contact during the initialization stage of contact formation under low contact force
topic DRNTU::Engineering::Electrical and electronic engineering
url https://hdl.handle.net/10356/97581
http://hdl.handle.net/10220/11820
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AT kefeixiang studiesonthetransitionalbehaviorsofautoaumicrocontactduringtheinitializationstageofcontactformationunderlowcontactforce