Design and scalability of a memory array utilizing anchor-free nanoelectromechanical nonvolatile memory device

This letter explains a nanoelectromechanical (NEM) nonvolatile memory (NVM) architecture employing an anchor-free electrode (shuttle) structure. The proposed NEM device utilizes adhesion forces to achieve bistable mechanical states for nonvolatile data storage. The anchor-free electrode facilitates...

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Main Authors: Vaddi, Ramesh, Pott, Vincent, Chua, Geng Li, Lin, Julius Tsai Ming, Kim, Tony Tae-Hyoung
Other Authors: School of Electrical and Electronic Engineering
Format: Journal Article
Language:English
Published: 2013
Subjects:
Online Access:https://hdl.handle.net/10356/97897
http://hdl.handle.net/10220/11330
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author Vaddi, Ramesh
Pott, Vincent
Chua, Geng Li
Lin, Julius Tsai Ming
Kim, Tony Tae-Hyoung
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Vaddi, Ramesh
Pott, Vincent
Chua, Geng Li
Lin, Julius Tsai Ming
Kim, Tony Tae-Hyoung
author_sort Vaddi, Ramesh
collection NTU
description This letter explains a nanoelectromechanical (NEM) nonvolatile memory (NVM) architecture employing an anchor-free electrode (shuttle) structure. The proposed NEM device utilizes adhesion forces to achieve bistable mechanical states for nonvolatile data storage. The anchor-free electrode facilitates better scalability compared to conventional anchored NEM devices, which is desirable for circuit applications. The structure is electrostatically actuated and has low operating voltage. A novel memory cell consisting of the proposed NEM memory device and two MOS transistors (1NEM-2T) is proposed for array implementation. The scalability analysis of the proposed NEM NVM array is also presented.
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spelling ntu-10356/978972020-03-07T14:02:45Z Design and scalability of a memory array utilizing anchor-free nanoelectromechanical nonvolatile memory device Vaddi, Ramesh Pott, Vincent Chua, Geng Li Lin, Julius Tsai Ming Kim, Tony Tae-Hyoung School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering This letter explains a nanoelectromechanical (NEM) nonvolatile memory (NVM) architecture employing an anchor-free electrode (shuttle) structure. The proposed NEM device utilizes adhesion forces to achieve bistable mechanical states for nonvolatile data storage. The anchor-free electrode facilitates better scalability compared to conventional anchored NEM devices, which is desirable for circuit applications. The structure is electrostatically actuated and has low operating voltage. A novel memory cell consisting of the proposed NEM memory device and two MOS transistors (1NEM-2T) is proposed for array implementation. The scalability analysis of the proposed NEM NVM array is also presented. Accepted version 2013-07-12T06:31:05Z 2019-12-06T19:47:56Z 2013-07-12T06:31:05Z 2019-12-06T19:47:56Z 2012 2012 Journal Article https://hdl.handle.net/10356/97897 http://hdl.handle.net/10220/11330 10.1109/LED.2012.2206364 en IEEE electron device letters © 2012 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. The published version is available at DOI: [http://dx.doi.org/10.1109/LED.2012.2206364]. application/pdf
spellingShingle DRNTU::Engineering::Electrical and electronic engineering
Vaddi, Ramesh
Pott, Vincent
Chua, Geng Li
Lin, Julius Tsai Ming
Kim, Tony Tae-Hyoung
Design and scalability of a memory array utilizing anchor-free nanoelectromechanical nonvolatile memory device
title Design and scalability of a memory array utilizing anchor-free nanoelectromechanical nonvolatile memory device
title_full Design and scalability of a memory array utilizing anchor-free nanoelectromechanical nonvolatile memory device
title_fullStr Design and scalability of a memory array utilizing anchor-free nanoelectromechanical nonvolatile memory device
title_full_unstemmed Design and scalability of a memory array utilizing anchor-free nanoelectromechanical nonvolatile memory device
title_short Design and scalability of a memory array utilizing anchor-free nanoelectromechanical nonvolatile memory device
title_sort design and scalability of a memory array utilizing anchor free nanoelectromechanical nonvolatile memory device
topic DRNTU::Engineering::Electrical and electronic engineering
url https://hdl.handle.net/10356/97897
http://hdl.handle.net/10220/11330
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