Design and scalability of a memory array utilizing anchor-free nanoelectromechanical nonvolatile memory device
This letter explains a nanoelectromechanical (NEM) nonvolatile memory (NVM) architecture employing an anchor-free electrode (shuttle) structure. The proposed NEM device utilizes adhesion forces to achieve bistable mechanical states for nonvolatile data storage. The anchor-free electrode facilitates...
Main Authors: | Vaddi, Ramesh, Pott, Vincent, Chua, Geng Li, Lin, Julius Tsai Ming, Kim, Tony Tae-Hyoung |
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Other Authors: | School of Electrical and Electronic Engineering |
Format: | Journal Article |
Language: | English |
Published: |
2013
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/97897 http://hdl.handle.net/10220/11330 |
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