Amorphous/crystalline silicon heterojunction solar cells via remote inductively coupled plasma processing
Low-frequency inductively coupled plasma (ICP) has been widely used to deposit amorphous or microcrystalline Si thin films, but the intrinsic drawback namely ion bombardment effect limits its application in Si heterojunction solar cells. In this letter, we redesigned typical ICP and realized a remot...
| Main Authors: | , , , , , , , , |
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| Format: | Journal Article |
| Language: | English |
| Published: |
2013
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| Online Access: | https://hdl.handle.net/10356/97916 http://hdl.handle.net/10220/12019 |
| _version_ | 1826111374446559232 |
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| author | Xu, L. X. Xiao, S. Q. Xu, S. Zhou, H. P. Wei, D. Y. Huang, S. Y. Sern, C. C. Guo, Y. N. Khan, S. |
| author2 | Institute of Advanced Studies |
| author_facet | Institute of Advanced Studies Xu, L. X. Xiao, S. Q. Xu, S. Zhou, H. P. Wei, D. Y. Huang, S. Y. Sern, C. C. Guo, Y. N. Khan, S. |
| author_sort | Xu, L. X. |
| collection | NTU |
| description | Low-frequency inductively coupled plasma (ICP) has been widely used to deposit amorphous or microcrystalline Si thin films, but the intrinsic drawback namely ion bombardment effect limits its application in Si heterojunction solar cells. In this letter, we redesigned typical ICP and realized a remote plasma deposition with suppressed ion bombardment effect. This remote ICP system enables the synthesis of high quality amorphous Si layers with a compact network and a high hydrogen content (10.5%). By using this remote ICP system, we achieved amorphous/crystalline silicon heterojunction solar cells with an efficiency of 14.1% without any back surface field or textures. |
| first_indexed | 2024-10-01T02:49:39Z |
| format | Journal Article |
| id | ntu-10356/97916 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T02:49:39Z |
| publishDate | 2013 |
| record_format | dspace |
| spelling | ntu-10356/979162020-09-26T21:54:50Z Amorphous/crystalline silicon heterojunction solar cells via remote inductively coupled plasma processing Xu, L. X. Xiao, S. Q. Xu, S. Zhou, H. P. Wei, D. Y. Huang, S. Y. Sern, C. C. Guo, Y. N. Khan, S. Institute of Advanced Studies DRNTU::Science::Physics Low-frequency inductively coupled plasma (ICP) has been widely used to deposit amorphous or microcrystalline Si thin films, but the intrinsic drawback namely ion bombardment effect limits its application in Si heterojunction solar cells. In this letter, we redesigned typical ICP and realized a remote plasma deposition with suppressed ion bombardment effect. This remote ICP system enables the synthesis of high quality amorphous Si layers with a compact network and a high hydrogen content (10.5%). By using this remote ICP system, we achieved amorphous/crystalline silicon heterojunction solar cells with an efficiency of 14.1% without any back surface field or textures. Published version 2013-07-23T02:48:43Z 2019-12-06T19:48:18Z 2013-07-23T02:48:43Z 2019-12-06T19:48:18Z 2012 2012 Journal Article Xiao, S. Q., Xu, S., Zhou, H. P., Wei, D. Y., Huang, S. Y., Xu, L. X., et al. (2012). Amorphous/crystalline silicon heterojunction solar cells via remote inductively coupled plasma processing. Applied Physics Letters, 100(23), 233902-233902-4. 0003-6951 https://hdl.handle.net/10356/97916 http://hdl.handle.net/10220/12019 10.1063/1.4721642 en Applied physics letters © 2012 American Institute of Physics. This paper was published in Applied Physics Letters and is made available as an electronic reprint (preprint) with permission of American Institute of Physics. The paper can be found at the following official DOI: http://dx.doi.org/10.1063/1.4721642. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper is prohibited and is subject to penalties under law. application/pdf |
| spellingShingle | DRNTU::Science::Physics Xu, L. X. Xiao, S. Q. Xu, S. Zhou, H. P. Wei, D. Y. Huang, S. Y. Sern, C. C. Guo, Y. N. Khan, S. Amorphous/crystalline silicon heterojunction solar cells via remote inductively coupled plasma processing |
| title | Amorphous/crystalline silicon heterojunction solar cells via remote inductively coupled plasma processing |
| title_full | Amorphous/crystalline silicon heterojunction solar cells via remote inductively coupled plasma processing |
| title_fullStr | Amorphous/crystalline silicon heterojunction solar cells via remote inductively coupled plasma processing |
| title_full_unstemmed | Amorphous/crystalline silicon heterojunction solar cells via remote inductively coupled plasma processing |
| title_short | Amorphous/crystalline silicon heterojunction solar cells via remote inductively coupled plasma processing |
| title_sort | amorphous crystalline silicon heterojunction solar cells via remote inductively coupled plasma processing |
| topic | DRNTU::Science::Physics |
| url | https://hdl.handle.net/10356/97916 http://hdl.handle.net/10220/12019 |
| work_keys_str_mv | AT xulx amorphouscrystallinesiliconheterojunctionsolarcellsviaremoteinductivelycoupledplasmaprocessing AT xiaosq amorphouscrystallinesiliconheterojunctionsolarcellsviaremoteinductivelycoupledplasmaprocessing AT xus amorphouscrystallinesiliconheterojunctionsolarcellsviaremoteinductivelycoupledplasmaprocessing AT zhouhp amorphouscrystallinesiliconheterojunctionsolarcellsviaremoteinductivelycoupledplasmaprocessing AT weidy amorphouscrystallinesiliconheterojunctionsolarcellsviaremoteinductivelycoupledplasmaprocessing AT huangsy amorphouscrystallinesiliconheterojunctionsolarcellsviaremoteinductivelycoupledplasmaprocessing AT serncc amorphouscrystallinesiliconheterojunctionsolarcellsviaremoteinductivelycoupledplasmaprocessing AT guoyn amorphouscrystallinesiliconheterojunctionsolarcellsviaremoteinductivelycoupledplasmaprocessing AT khans amorphouscrystallinesiliconheterojunctionsolarcellsviaremoteinductivelycoupledplasmaprocessing |