The new way of controlling aluminum-doped zinc oxide films properties : ion beam post-treatment with cooling system
AZO thin films with low surface roughness and low sheet resistance are required in the touch panels and display panels. In this work, we investigated the substrate cooling effect of the ion beam post-treatment on AZO films properties, and one new way to obtain low surface roughness and low sheet res...
| Main Authors: | , , , , , |
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| Other Authors: | |
| Format: | Journal Article |
| Language: | English |
| Published: |
2013
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/99300 http://hdl.handle.net/10220/17629 |
| _version_ | 1826118875304951808 |
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| author | Ni, Zhengji Zhang, Dawei Sun, Haojie Wang, Wenna Zhang, Dao Hua Mei, Ting |
| author2 | School of Electrical and Electronic Engineering |
| author_facet | School of Electrical and Electronic Engineering Ni, Zhengji Zhang, Dawei Sun, Haojie Wang, Wenna Zhang, Dao Hua Mei, Ting |
| author_sort | Ni, Zhengji |
| collection | NTU |
| description | AZO thin films with low surface roughness and low sheet resistance are required in the touch panels and display panels. In this work, we investigated the substrate cooling effect of the ion beam post-treatment on AZO films properties, and one new way to obtain low surface roughness and low sheet resistance at the same time was proposed. The more exciting find of this paper is that, compared to the samples without cooling during the process of the ion beam post-treatment, samples with proper cooling voltage show a sheet resistance decrease of 26 % (from 11.9 Ω/□ to 8.8 Ω/□) and a roughness decrease of 35.5 % (from 13.389 nm to 8.637 nm) without transparency losing. And the viewpoint that substrate cooling has the effect of weakening the crystallization, especially for the subface and internal parts of samples is deduced. |
| first_indexed | 2024-10-01T04:50:41Z |
| format | Journal Article |
| id | ntu-10356/99300 |
| institution | Nanyang Technological University |
| language | English |
| last_indexed | 2024-10-01T04:50:41Z |
| publishDate | 2013 |
| record_format | dspace |
| spelling | ntu-10356/993002020-03-07T14:02:36Z The new way of controlling aluminum-doped zinc oxide films properties : ion beam post-treatment with cooling system Ni, Zhengji Zhang, Dawei Sun, Haojie Wang, Wenna Zhang, Dao Hua Mei, Ting School of Electrical and Electronic Engineering DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films AZO thin films with low surface roughness and low sheet resistance are required in the touch panels and display panels. In this work, we investigated the substrate cooling effect of the ion beam post-treatment on AZO films properties, and one new way to obtain low surface roughness and low sheet resistance at the same time was proposed. The more exciting find of this paper is that, compared to the samples without cooling during the process of the ion beam post-treatment, samples with proper cooling voltage show a sheet resistance decrease of 26 % (from 11.9 Ω/□ to 8.8 Ω/□) and a roughness decrease of 35.5 % (from 13.389 nm to 8.637 nm) without transparency losing. And the viewpoint that substrate cooling has the effect of weakening the crystallization, especially for the subface and internal parts of samples is deduced. 2013-11-14T06:24:13Z 2019-12-06T20:05:32Z 2013-11-14T06:24:13Z 2019-12-06T20:05:32Z 2013 2013 Journal Article Ni, Z., Zhang, D., Sun, H., Wang, W., Zhang, D. H., & Mei, T. (2013). The new way of controlling aluminum-doped zinc oxide films properties: ion beam post-treatment with cooling system. Applied physics A, 112(3), 569-573. https://hdl.handle.net/10356/99300 http://hdl.handle.net/10220/17629 10.1007/s00339-013-7803-3 en Applied physics A |
| spellingShingle | DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films Ni, Zhengji Zhang, Dawei Sun, Haojie Wang, Wenna Zhang, Dao Hua Mei, Ting The new way of controlling aluminum-doped zinc oxide films properties : ion beam post-treatment with cooling system |
| title | The new way of controlling aluminum-doped zinc oxide films properties : ion beam post-treatment with cooling system |
| title_full | The new way of controlling aluminum-doped zinc oxide films properties : ion beam post-treatment with cooling system |
| title_fullStr | The new way of controlling aluminum-doped zinc oxide films properties : ion beam post-treatment with cooling system |
| title_full_unstemmed | The new way of controlling aluminum-doped zinc oxide films properties : ion beam post-treatment with cooling system |
| title_short | The new way of controlling aluminum-doped zinc oxide films properties : ion beam post-treatment with cooling system |
| title_sort | new way of controlling aluminum doped zinc oxide films properties ion beam post treatment with cooling system |
| topic | DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films |
| url | https://hdl.handle.net/10356/99300 http://hdl.handle.net/10220/17629 |
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